Abstract

Many applications, such as semiconductor lithography and material processing, require the shaping of laser beams to provide a homogenous field illumination. We present the conception, implementation, and experimental verification of a combined single-element homogenizer. Additionally, for excimer laser applications, the concept is associated with a coherence scrambling capability. We used the technique of holographic interference lithography to integrate the multifunctional properties in a diffractive optical element. The wavelength difference between the recording process (457.9  nm) and the application (193  nm) results in a change of the imaging properties and requires a geometrical adaptation of the optical setup. The coherence scrambling effect of the setup is based on an off-axis design, including the beam shaping diffractive structure.

© 2007 Optical Society of America

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