Abstract

We present an algorithm for the automatic generation of a monitoring spreadsheet that enables the most effective application of the termination level correction algorithm proposed in our previous publication. On a whole the presented monochromatic monitoring strategy entirely eliminates a cumulative effect of thickness errors in optical coating production using direct optical monitoring. The effectiveness of the new monitoring strategy is demonstrated by computational manufacturing experiments in which such error factors as instability of deposition rates, errors in measured transmittance data, shutter delays, and variations of layer refractive indices from their theoretical values are simulated.

© 2007 Optical Society of America

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