Abstract

A new cost-efficient sputter-slice technology for hard x-ray (1030  keV) Fresnel zone plates fabrication, imposing no limitation to aspect ratio, is proposed. By means of a plasma chemical process, SiO2/Si1xGexO2 glassy film multilayer structures are deposited on a lateral surface of a silica rod, outermost layers being as thin as 100  nm. It has been shown by numerical simulation that for x=0.2 germanium fraction, 100300μm zone plate thickness and the number of zones of about 1000, first order diffraction efficiency as high as 20%–30% at the energy of approximately 20 keV can be achieved.

© 2007 Optical Society of America

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References

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  1. G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, and Y. Liu, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006).
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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  9. K. M. Golant and E. I. Golant, "Fabrication of multilayer claddings for optical waveguides by SPCVD," in Proceedings of 10th Microoptics Conference (Jena, Germany, 2004), CD ROM, paper L-63.
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    [CrossRef]
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    [CrossRef]

2006

K. W. Kim, Y. Kwon, K.-Y. Nam, J.-H. Lim, K.-G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K.-H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K.-S. Choi, S. E. Yoon, E.-A. Kim, Y. Namba, and K.-H. Yoon, "Compact soft X-ray transmission microscopy with sub-50 nm spatial resolution," Phys. Med. Biol. 51, N99-107 (2006).
[CrossRef] [PubMed]

G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, and Y. Liu, "Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light," Opt. Lett. 31, 1214-1216 (2006).
[CrossRef] [PubMed]

2005

2002

K. M. Golant, O. V. Butov, A. N. Denisov, V. M. Mashinsky, O. D. Sazhin, C. M. Smith, and S. V. Muraviov, Phys. Chem. Glasses 43C, 131-136 (2002).

1995

Yu. V. Kopylov, A. V. Popov, and A. V. Vinogradov, "Application of the parabolic wave equation to X-ray diffraction optics," Opt. Commun. 118, 619-636 (1995).
[CrossRef]

1994

A. V. Vinogradov and V. E. Levashev, "Analytical theory of zone plate efficiency," Phys. Rev. E 49, 5797-5803 (1994).
[CrossRef]

Opt. Commun.

Yu. V. Kopylov, A. V. Popov, and A. V. Vinogradov, "Application of the parabolic wave equation to X-ray diffraction optics," Opt. Commun. 118, 619-636 (1995).
[CrossRef]

Opt. Lett.

Phys. Chem. Glasses

K. M. Golant, O. V. Butov, A. N. Denisov, V. M. Mashinsky, O. D. Sazhin, C. M. Smith, and S. V. Muraviov, Phys. Chem. Glasses 43C, 131-136 (2002).

Phys. Med. Biol.

K. W. Kim, Y. Kwon, K.-Y. Nam, J.-H. Lim, K.-G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K.-H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K.-S. Choi, S. E. Yoon, E.-A. Kim, Y. Namba, and K.-H. Yoon, "Compact soft X-ray transmission microscopy with sub-50 nm spatial resolution," Phys. Med. Biol. 51, N99-107 (2006).
[CrossRef] [PubMed]

Phys. Rev. E

A. V. Vinogradov and V. E. Levashev, "Analytical theory of zone plate efficiency," Phys. Rev. E 49, 5797-5803 (1994).
[CrossRef]

Other

A. Duvel, D. Rudolph, and G. Schmahl, "Fabrication of thick zone plates for multikilovolt X-rays," in Proceedings of 6th International Conference on X-ray Microscopy, W. Meyer-Ilse, T. Warwick, and D. Attwood, eds. (American Institute of Physics CP507, 2000), pp. 607-614.

D. Pavy, M. Moisan, S. Saada, P. Chollet, P. Leprince, and J. Marrec, "Fabrication of optical fiber preforms by a new surface-plasma CVD process," in Proceedings of 12th European Conference on Optical Communications (Barcelona, 1986), pp. 19-22.

M. Kuyumchyan, A. Isoyan, A. Shulakov, E. Aristov, V. Kondratenkov, M. Snigirev, A. Snigireva, and I. Yabashi, "High efficiency and low absorption Fresnel compound zone plates for hard X-ray focusing," http://arxiv.org/pdf/cs.OH/0503005 (Cornell University, 2005).

D. T. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications (Cambridge University Press, 1999).

K. M. Golant and E. I. Golant, "Fabrication of multilayer claddings for optical waveguides by SPCVD," in Proceedings of 10th Microoptics Conference (Jena, Germany, 2004), CD ROM, paper L-63.

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Figures (3)

Fig. 1
Fig. 1

SPCVD process applied to the deposition of multilayer germano-silicate structures on a silica substrate rod for FXZP production.

Fig. 2
Fig. 2

SEM image of the deposited multilayer coating. Light bars in the inset correspond to Ge-doped silica.

Fig. 3
Fig. 3

Numerical simulation of focusing with FXZP (central rod diameter = 0.8   mm , number of layers = 100 ), when illuminated by a plane wave. The output surface of the zone plate is located at z = 0 . The graded gray scale indicates decimal logarithm of the wave field amplitude (arbitrary units).

Equations (30)

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( 10 30   keV )
SiO 2 / Si 1 x G e x O 2
100   nm
x = 0.2
100 300 μ m
( λ = 46.9   nm )
( energy > 10   keV )
r n
r n = r 0 2 + λ F n ,   n = 1 , 2 ,  …  , N ,
r 0
( 2.4 < λ < 4.4   nm )
10   nm
10 4
40 cm
16   mm
= 2   mm
2.45   GHz
5   kW
0.5 5   mm
10 30   keV
SiO 2 / Si 0.8 Ge 0 .2 O 2
10 30   kev
100 300 μ m
0.8   mm
1100   mm
100   nm
10 30   keV
= 0.8   mm
= 100
z = 0

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