Y. Morimoto, T. Matui, M. Fujigaki, and N. Kawagishi, "Subnanometer displacement measurement by averaging of phase difference in windowed digital holographic interferometry," Opt. Eng. 46, 025603-1-8 (2007).

[CrossRef]

G. Srikanth, "Measurement of period of interference patterns with submicron period," Opt. Laser Technol. 39, 918-921 (2007).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

L.-Z. Cai, Q. Liu, Y.-R. Wang, X.-F. Meng, and M. Z. He, "Experimental demonstrations of the digital correlation of complex wave errors caused by arbitrary phase-shift errors in phase-shifting interferometry," Appl. Opt. 45, 1193-1202 (2006).

[CrossRef]
[PubMed]

H.-A. Bachor, C. Fabre, P. K. Lam, and N. Treps, "Teaching a laser beam to go straight," Contemp. Phys. 46, 395-405 (2005).

[CrossRef]

N. Massari, L. Gonzo, M. Gottardi, and A. Simoni, "A fast CMOS optical position sensor with high subpixel resolution," IEEE Trans. Instrum. Meas. 53, 116-123 (2004).

[CrossRef]

Z. Zalevsky, Y. Shrot, and D. Mendelovic, "Novel denoising algorithm for obtaining a superresolved position estimation," Opt. Eng. 41, 1355-1357 (2002).

[CrossRef]

A. K. Poteomkin, A. N. Mal'shakov, and N. F. Andreev, "Use of self-focusing for measurements of ultrasmall (less than λ/3000) wave-front distortions," J. Opt. Soc. Am. B 19, 650-655 (2002).

[CrossRef]

H. Canabal, J. Alonso, and E. Bernabeu, "Laser beam deflectometry based on a subpixel resolution algorithm," Opt. Eng. 40, 2517-2523 (2001).

[CrossRef]

S. H. Low, N. F. Maxemchuk, and A. M. Lapone, "Document identification for copyright protection using centroid detection," IEEE Trans. Commun. 46, 372-383 (1998).

[CrossRef]

Z. Wang, P. J. Bryanston-Cross, and D. J. Whitehouse, "Phase difference determination by fringe pattern matching," Opt. Laser Technol. 28, 417-422 (1996).

[CrossRef]

J. D. Valentine and A. E. Rana, "Centroid and full-width at half maximum uncertainties of histogrammed data with an underlying Gaussian distribution--the moments method," IEEE Trans. Nucl. Sci. 43, 2501-2508 (1996).

[CrossRef]

C. S. Vikram, "Holography of erosion, corrosion, and mechanical wear: possible role of phase-shifting interferometry," Opt. Eng. 35, 1795-1796 (1996).

[CrossRef]

S. Hosoe, "Highly precise and stable laser displacement measurement interferometer with differential optical passes in practical use," Nanotechnology 4, 81-85 (1993).

[CrossRef]

S. Hosoe, "Laser interferometric system for displacement measurement with high precision," Nanotechnology 2, 88-95 (1991).

[CrossRef]

R. S. Sirohi and M. P. Kothiyal, *Optical Components, Systems, and Measurement Techniques* (Marcel Dekker, 1991).

See, for example, H. J. Caulfield, "Centroid detection in metrology," Opt. Commun. 36, 439-440 (1981).

[CrossRef]

F. Bien, M. Camac, H. J. Caulfield, and S. Ezekiel, "Absolute distance measurements by variable wavelength interferometry," Appl. Opt. 20, 400-403 (1981).

[CrossRef]
[PubMed]

H. Canabal, J. Alonso, and E. Bernabeu, "Laser beam deflectometry based on a subpixel resolution algorithm," Opt. Eng. 40, 2517-2523 (2001).

[CrossRef]

H.-A. Bachor, C. Fabre, P. K. Lam, and N. Treps, "Teaching a laser beam to go straight," Contemp. Phys. 46, 395-405 (2005).

[CrossRef]

H. Canabal, J. Alonso, and E. Bernabeu, "Laser beam deflectometry based on a subpixel resolution algorithm," Opt. Eng. 40, 2517-2523 (2001).

[CrossRef]

L.-Z. Cai, Q. Liu, Y.-R. Wang, X.-F. Meng, and M. Z. He, "Experimental demonstrations of the digital correlation of complex wave errors caused by arbitrary phase-shift errors in phase-shifting interferometry," Appl. Opt. 45, 1193-1202 (2006).

[CrossRef]
[PubMed]

C.-S. Guo, Z.-Y. Rong, J.-L. He, H.-T. Wang, L.-Z. Cai, and Y.-R. Wang, "Determination of global phase shifts between interferograms by use of an energy-minimum algorithm," Appl. Opt. 42, 6514-6519 (2003).

[CrossRef]
[PubMed]

H. Canabal, J. Alonso, and E. Bernabeu, "Laser beam deflectometry based on a subpixel resolution algorithm," Opt. Eng. 40, 2517-2523 (2001).

[CrossRef]

See, for example, H. J. Caulfield, "Centroid detection in metrology," Opt. Commun. 36, 439-440 (1981).

[CrossRef]

F. Bien, M. Camac, H. J. Caulfield, and S. Ezekiel, "Absolute distance measurements by variable wavelength interferometry," Appl. Opt. 20, 400-403 (1981).

[CrossRef]
[PubMed]

C. S. Vikram and H. J. Caulfield, "Position-sensing detector for logical operations in incoherent light," Opt. Eng. 44, 115201-1-4 (2005).

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

H.-A. Bachor, C. Fabre, P. K. Lam, and N. Treps, "Teaching a laser beam to go straight," Contemp. Phys. 46, 395-405 (2005).

[CrossRef]

Y. Morimoto, T. Matui, M. Fujigaki, and N. Kawagishi, "Subnanometer displacement measurement by averaging of phase difference in windowed digital holographic interferometry," Opt. Eng. 46, 025603-1-8 (2007).

[CrossRef]

N. Massari, L. Gonzo, M. Gottardi, and A. Simoni, "A fast CMOS optical position sensor with high subpixel resolution," IEEE Trans. Instrum. Meas. 53, 116-123 (2004).

[CrossRef]

N. Massari, L. Gonzo, M. Gottardi, and A. Simoni, "A fast CMOS optical position sensor with high subpixel resolution," IEEE Trans. Instrum. Meas. 53, 116-123 (2004).

[CrossRef]

S. Hosoe, "Highly precise and stable laser displacement measurement interferometer with differential optical passes in practical use," Nanotechnology 4, 81-85 (1993).

[CrossRef]

S. Hosoe, "Laser interferometric system for displacement measurement with high precision," Nanotechnology 2, 88-95 (1991).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

Y. Morimoto, T. Matui, M. Fujigaki, and N. Kawagishi, "Subnanometer displacement measurement by averaging of phase difference in windowed digital holographic interferometry," Opt. Eng. 46, 025603-1-8 (2007).

[CrossRef]

R. S. Sirohi and M. P. Kothiyal, *Optical Components, Systems, and Measurement Techniques* (Marcel Dekker, 1991).

H.-A. Bachor, C. Fabre, P. K. Lam, and N. Treps, "Teaching a laser beam to go straight," Contemp. Phys. 46, 395-405 (2005).

[CrossRef]

S. H. Low, N. F. Maxemchuk, and A. M. Lapone, "Document identification for copyright protection using centroid detection," IEEE Trans. Commun. 46, 372-383 (1998).

[CrossRef]

S. H. Low, N. F. Maxemchuk, and A. M. Lapone, "Document identification for copyright protection using centroid detection," IEEE Trans. Commun. 46, 372-383 (1998).

[CrossRef]

N. Massari, L. Gonzo, M. Gottardi, and A. Simoni, "A fast CMOS optical position sensor with high subpixel resolution," IEEE Trans. Instrum. Meas. 53, 116-123 (2004).

[CrossRef]

Y. Morimoto, T. Matui, M. Fujigaki, and N. Kawagishi, "Subnanometer displacement measurement by averaging of phase difference in windowed digital holographic interferometry," Opt. Eng. 46, 025603-1-8 (2007).

[CrossRef]

S. H. Low, N. F. Maxemchuk, and A. M. Lapone, "Document identification for copyright protection using centroid detection," IEEE Trans. Commun. 46, 372-383 (1998).

[CrossRef]

Z. Zalevsky, Y. Shrot, and D. Mendelovic, "Novel denoising algorithm for obtaining a superresolved position estimation," Opt. Eng. 41, 1355-1357 (2002).

[CrossRef]

Y. Morimoto, T. Matui, M. Fujigaki, and N. Kawagishi, "Subnanometer displacement measurement by averaging of phase difference in windowed digital holographic interferometry," Opt. Eng. 46, 025603-1-8 (2007).

[CrossRef]

J. D. Valentine and A. E. Rana, "Centroid and full-width at half maximum uncertainties of histogrammed data with an underlying Gaussian distribution--the moments method," IEEE Trans. Nucl. Sci. 43, 2501-2508 (1996).

[CrossRef]

Z. Zalevsky, Y. Shrot, and D. Mendelovic, "Novel denoising algorithm for obtaining a superresolved position estimation," Opt. Eng. 41, 1355-1357 (2002).

[CrossRef]

N. Massari, L. Gonzo, M. Gottardi, and A. Simoni, "A fast CMOS optical position sensor with high subpixel resolution," IEEE Trans. Instrum. Meas. 53, 116-123 (2004).

[CrossRef]

R. S. Sirohi and M. P. Kothiyal, *Optical Components, Systems, and Measurement Techniques* (Marcel Dekker, 1991).

G. Srikanth, "Measurement of period of interference patterns with submicron period," Opt. Laser Technol. 39, 918-921 (2007).

[CrossRef]

H.-A. Bachor, C. Fabre, P. K. Lam, and N. Treps, "Teaching a laser beam to go straight," Contemp. Phys. 46, 395-405 (2005).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

J. D. Valentine and A. E. Rana, "Centroid and full-width at half maximum uncertainties of histogrammed data with an underlying Gaussian distribution--the moments method," IEEE Trans. Nucl. Sci. 43, 2501-2508 (1996).

[CrossRef]

C. S. Vikram, "Holography of erosion, corrosion, and mechanical wear: possible role of phase-shifting interferometry," Opt. Eng. 35, 1795-1796 (1996).

[CrossRef]

C. S. Vikram and H. J. Caulfield, "Position-sensing detector for logical operations in incoherent light," Opt. Eng. 44, 115201-1-4 (2005).

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

L.-Z. Cai, Q. Liu, Y.-R. Wang, X.-F. Meng, and M. Z. He, "Experimental demonstrations of the digital correlation of complex wave errors caused by arbitrary phase-shift errors in phase-shifting interferometry," Appl. Opt. 45, 1193-1202 (2006).

[CrossRef]
[PubMed]

C.-S. Guo, Z.-Y. Rong, J.-L. He, H.-T. Wang, L.-Z. Cai, and Y.-R. Wang, "Determination of global phase shifts between interferograms by use of an energy-minimum algorithm," Appl. Opt. 42, 6514-6519 (2003).

[CrossRef]
[PubMed]

Z. Wang, P. J. Bryanston-Cross, and D. J. Whitehouse, "Phase difference determination by fringe pattern matching," Opt. Laser Technol. 28, 417-422 (1996).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

Z. Zalevsky, Y. Shrot, and D. Mendelovic, "Novel denoising algorithm for obtaining a superresolved position estimation," Opt. Eng. 41, 1355-1357 (2002).

[CrossRef]

C.-S. Guo, Z.-Y. Rong, J.-L. He, H.-T. Wang, L.-Z. Cai, and Y.-R. Wang, "Determination of global phase shifts between interferograms by use of an energy-minimum algorithm," Appl. Opt. 42, 6514-6519 (2003).

[CrossRef]
[PubMed]

F. Bien, M. Camac, H. J. Caulfield, and S. Ezekiel, "Absolute distance measurements by variable wavelength interferometry," Appl. Opt. 20, 400-403 (1981).

[CrossRef]
[PubMed]

P. J. Bryanston-Cross and Z. Wang, "Camera focusing based on fringe pattern matching," Appl. Opt. 36, 6498-6502 (1997).

[CrossRef]

Y.-Y. Cheng and J. C. Wyant, "Phase shifter calibration in phase-shifting interferometry," Appl. Opt. 24, 3049-3052 (1985).

[CrossRef]
[PubMed]

H. van Brug, "Phase-step calibration for phase-stepped interferometry," Appl. Opt. 38, 3549-3555 (1999).

[CrossRef]

L.-Z. Cai, Q. Liu, Y.-R. Wang, X.-F. Meng, and M. Z. He, "Experimental demonstrations of the digital correlation of complex wave errors caused by arbitrary phase-shift errors in phase-shifting interferometry," Appl. Opt. 45, 1193-1202 (2006).

[CrossRef]
[PubMed]

H.-A. Bachor, C. Fabre, P. K. Lam, and N. Treps, "Teaching a laser beam to go straight," Contemp. Phys. 46, 395-405 (2005).

[CrossRef]

S. H. Low, N. F. Maxemchuk, and A. M. Lapone, "Document identification for copyright protection using centroid detection," IEEE Trans. Commun. 46, 372-383 (1998).

[CrossRef]

N. Massari, L. Gonzo, M. Gottardi, and A. Simoni, "A fast CMOS optical position sensor with high subpixel resolution," IEEE Trans. Instrum. Meas. 53, 116-123 (2004).

[CrossRef]

J. D. Valentine and A. E. Rana, "Centroid and full-width at half maximum uncertainties of histogrammed data with an underlying Gaussian distribution--the moments method," IEEE Trans. Nucl. Sci. 43, 2501-2508 (1996).

[CrossRef]

S. Hosoe, "Laser interferometric system for displacement measurement with high precision," Nanotechnology 2, 88-95 (1991).

[CrossRef]

S. Hosoe, "Highly precise and stable laser displacement measurement interferometer with differential optical passes in practical use," Nanotechnology 4, 81-85 (1993).

[CrossRef]

See, for example, H. J. Caulfield, "Centroid detection in metrology," Opt. Commun. 36, 439-440 (1981).

[CrossRef]

C. S. Vikram and H. J. Caulfield, "Position-sensing detector for logical operations in incoherent light," Opt. Eng. 44, 115201-1-4 (2005).

C. S. Vikram, "Holography of erosion, corrosion, and mechanical wear: possible role of phase-shifting interferometry," Opt. Eng. 35, 1795-1796 (1996).

[CrossRef]

H. Canabal, J. Alonso, and E. Bernabeu, "Laser beam deflectometry based on a subpixel resolution algorithm," Opt. Eng. 40, 2517-2523 (2001).

[CrossRef]

Z. Zalevsky, Y. Shrot, and D. Mendelovic, "Novel denoising algorithm for obtaining a superresolved position estimation," Opt. Eng. 41, 1355-1357 (2002).

[CrossRef]

Y. Morimoto, T. Matui, M. Fujigaki, and N. Kawagishi, "Subnanometer displacement measurement by averaging of phase difference in windowed digital holographic interferometry," Opt. Eng. 46, 025603-1-8 (2007).

[CrossRef]

G. Srikanth, "Measurement of period of interference patterns with submicron period," Opt. Laser Technol. 39, 918-921 (2007).

[CrossRef]

Z. Wang, P. J. Bryanston-Cross, and D. J. Whitehouse, "Phase difference determination by fringe pattern matching," Opt. Laser Technol. 28, 417-422 (1996).

[CrossRef]

C. H. Chien, Y. D. Wu, Y. T. Chiou, C. C. Hsieh, Y. C. Chen, T. P. Chen, M. L. Tsai, and C. T. Wang, "Nanoscale deformation measurement by using the hybrid method of gray-level and holographic interferometry," Optics and Lasers in Engineering 44, 80-91 (2006).

[CrossRef]

R. S. Sirohi and M. P. Kothiyal, *Optical Components, Systems, and Measurement Techniques* (Marcel Dekker, 1991).