Abstract

Ion-beam sputtering (IBS) and evaporation are the two deposition techniques that have been used to deposit coatings of Al protected with MgF2 with high reflectance in the vacuum ultraviolet down to 115  nm. Evaporation deposited (ED) Al protected with IBS MgF2 resulted in a larger (smaller) reflectance below (above) 125  nm than the well-known all-evaporated coatings. A similar comparison is obtained when the Al film is deposited by IBS instead of evaporation. The lower reflectance of the coatings protected with IBS versus ED MgF2 above 125  nm is because of larger absorption of the former. Both nonprotected IBS Al, as well as IBS Al protected with ED MgF2, resulted in a band of reflectance loss that was peaked at 127 and 157  nm, respectively. This result was attributed to the excitation of surface plasmons due to the enhancement of surface roughness with large spatial wave vectors in the sputter deposition. This reflectance loss for IBS Al protected with MgF2 is small at the short (λ120  nm) and long (λ>350  nm) wavelengths investigated. IBS Al protected with ED MgF2 is thus a promising coating for these two spectral regions. Coatings protected with IBS MgF2 resulted in a reflectance as high as coatings protected with ED MgF2 at wavelengths longer than 550  nm, whereas the former had a lower reflectance below this wavelength.

© 2007 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (196)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription