R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

S. Haykin, Neural Networks—*A Comprehensive Foundation*, 2nd ed. (Prentice-Hall, 1999).

J. Nunn, W. Mirande, H. Jacobsen, and N. Talene, *Challenges in the calibration of a photomask linewidth standard developed for the European Commission*, VDE-VDI Conference Proceedings: Mask Technology for Integrated Circuits and Microcomponents, 53-68 (1997).

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[CrossRef]

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty III: the dimension of the space of essentially time- and band-limited signals," Bell Syst. Tech. J. 41, 1295-1336 (1962).

D. Slepian and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty I," Bell Syst. Tech. J. 40, 43-63 (1961).

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty II," Bell Syst. Tech. J. 40, 65-84 (1961).

H. Wolter, in *Progress in Optics*, E. Wolf, ed. (North-Holland, 1961), Vol. 1, Chap. 5.

E. T. Whittaker and G. N. Watson, *A Course of Modern Analysis*, 4th ed. (Cambridge University Press, 1927).

R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

R. W. Gerchberg, "Super-resolution through error energy reduction," Opt. Acta 21, 709-720 (1974).

[CrossRef]

K. Gurney, *An Introduction to Neural Networks* (UCL Press, 1996).

M. H. Hayes, *Statistical Digital Signal Processing and Modeling* (Wiley, 1996).

S. Haykin, Neural Networks—*A Comprehensive Foundation*, 2nd ed. (Prentice-Hall, 1999).

J. Nunn, W. Mirande, H. Jacobsen, and N. Talene, *Challenges in the calibration of a photomask linewidth standard developed for the European Commission*, VDE-VDI Conference Proceedings: Mask Technology for Integrated Circuits and Microcomponents, 53-68 (1997).

[PubMed]

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty III: the dimension of the space of essentially time- and band-limited signals," Bell Syst. Tech. J. 41, 1295-1336 (1962).

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty II," Bell Syst. Tech. J. 40, 65-84 (1961).

J. Nunn, W. Mirande, H. Jacobsen, and N. Talene, *Challenges in the calibration of a photomask linewidth standard developed for the European Commission*, VDE-VDI Conference Proceedings: Mask Technology for Integrated Circuits and Microcomponents, 53-68 (1997).

[PubMed]

J. Nunn, W. Mirande, H. Jacobsen, and N. Talene, *Challenges in the calibration of a photomask linewidth standard developed for the European Commission*, VDE-VDI Conference Proceedings: Mask Technology for Integrated Circuits and Microcomponents, 53-68 (1997).

[PubMed]

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty III: the dimension of the space of essentially time- and band-limited signals," Bell Syst. Tech. J. 41, 1295-1336 (1962).

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty II," Bell Syst. Tech. J. 40, 65-84 (1961).

D. Slepian and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty I," Bell Syst. Tech. J. 40, 43-63 (1961).

R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

N. B. E. Sawyer, C. W. See, M. Clark, M. G. Somekh, and J. Y. L. Goh, "Ultrastable absolute-phase common-path optical profiler based on computer-generated holography," Appl. Opt. 37, 6716-6720 (1998).

[CrossRef]

D. Slepian and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty I," Bell Syst. Tech. J. 40, 43-63 (1961).

R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

N. B. E. Sawyer, C. W. See, M. Clark, M. G. Somekh, and J. Y. L. Goh, "Ultrastable absolute-phase common-path optical profiler based on computer-generated holography," Appl. Opt. 37, 6716-6720 (1998).

[CrossRef]

J. Nunn, W. Mirande, H. Jacobsen, and N. Talene, *Challenges in the calibration of a photomask linewidth standard developed for the European Commission*, VDE-VDI Conference Proceedings: Mask Technology for Integrated Circuits and Microcomponents, 53-68 (1997).

[PubMed]

E. T. Whittaker and G. N. Watson, *A Course of Modern Analysis*, 4th ed. (Cambridge University Press, 1927).

E. T. Whittaker and G. N. Watson, *A Course of Modern Analysis*, 4th ed. (Cambridge University Press, 1927).

H. Wolter, in *Progress in Optics*, E. Wolf, ed. (North-Holland, 1961), Vol. 1, Chap. 5.

R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

K. Minami, S. Kawata, and S. Minami, "Surper-resolution of Fourier transform spectra by autoregressive model fitting with singular value decomposition," Appl. Opt. 24, 162-166 (1985).

[CrossRef]
[PubMed]

N. B. E. Sawyer, C. W. See, M. Clark, M. G. Somekh, and J. Y. L. Goh, "Ultrastable absolute-phase common-path optical profiler based on computer-generated holography," Appl. Opt. 37, 6716-6720 (1998).

[CrossRef]

D. Slepian and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty I," Bell Syst. Tech. J. 40, 43-63 (1961).

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty II," Bell Syst. Tech. J. 40, 65-84 (1961).

H. J. Landau and H. O. Pollak, "Prolate spheroidal wave functions, Fourier analysis, and uncertainty III: the dimension of the space of essentially time- and band-limited signals," Bell Syst. Tech. J. 41, 1295-1336 (1962).

C. K. Rushforth and R. W. Harris, "Restoration, resolution, and noise," J. Opt. Soc. Am. 58, 539-545 (1968).

[CrossRef]

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[CrossRef]

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W. Lukosz, "Optical systems with resolving powers exceeding the classical limit II," J. Opt. Soc. Am. 57, 932-941 (1967).

[CrossRef]

J. L. Harris, "Diffraction and resolving power," J. Opt. Soc. Am. 54, 931-936 (1964).

[CrossRef]

C. W. Barnes, "Object restoration in a diffraction limited imaging system," J. Opt. Soc. Am. 56, 575-578 (1966).

[CrossRef]

G. Toraldo di Francia, "Resolving power and information," J. Opt. Soc. Am. 45, 497-501 (1955).

[CrossRef]

R. J. Smith, C. W. See, M. G. Somekh, A. Yacoot, and E. Choi, "Optical track width measurements below 100 nm using artificial neural networks," Meas. Sci. Technol. 16, 2397-2404 (2005).

[CrossRef]

R. W. Gerchberg, "Super-resolution through error energy reduction," Opt. Acta 21, 709-720 (1974).

[CrossRef]

J. Nunn, W. Mirande, H. Jacobsen, and N. Talene, *Challenges in the calibration of a photomask linewidth standard developed for the European Commission*, VDE-VDI Conference Proceedings: Mask Technology for Integrated Circuits and Microcomponents, 53-68 (1997).

[PubMed]

Although it can be shown readily that if a second profile is measured under a different experimental condition this will provide sufficient information to resolve the ambiguity.

H. Wolter, in *Progress in Optics*, E. Wolf, ed. (North-Holland, 1961), Vol. 1, Chap. 5.

E. T. Whittaker and G. N. Watson, *A Course of Modern Analysis*, 4th ed. (Cambridge University Press, 1927).

M. H. Hayes, *Statistical Digital Signal Processing and Modeling* (Wiley, 1996).

S. Haykin, Neural Networks—*A Comprehensive Foundation*, 2nd ed. (Prentice-Hall, 1999).

K. Gurney, *An Introduction to Neural Networks* (UCL Press, 1996).