The on-axis wavefront aberrations of a one-dimensional subwavelength-grating antireflection coating on an lens surface are shown to be small with noticeable contributions of defocus, astigmatism, and piston. The astigmatism is 0.02 wave, and the magnitude of the piston approaches one wave peak-to-valley. The difference in aberrations between orthogonally polarized wavefronts, or the retardance aberration, shows 0.01 wave of astigmatismlike variation and more than 0.01 wave of retardance-induced defocuslike variation. A small coupling between polarization states occurs in the form of the familiar Maltese cross, yielding a maximum of 3% coupling in the four diagonal edges of the pupil.
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