Abstract

We show an interferometric method for measuring phase change with known uncertainty. Because this measurement uses the backreflection from a sample, the height is intrinsically removed, and only the phase change is measured. The uncertainty in the phase change measurement is ±3.8° and is dominated by the background subtraction method. We also investigate the effect of the phase change on the interferometric radius measurement. The theoretical worst-case error in the interferometric radius measurement due to the phase change is 30  nm.

© 2007 Optical Society of America

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