Abstract
We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a duty ratio is discussed on the basis of the optical transfer function. By optimizing the imaging condition, we obtained high-contrast images with high light power under a magnified or demagnified imaging system. The amplitude of the signal in the displacement measurement was four times higher than that of the conventional grating imaging system with amplitude gratings.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Kazuhiro Hane and Chander P. Grover
Appl. Opt. 26(12) 2355-2359 (1987)
K. Hane and C. P. Grover
J. Opt. Soc. Am. A 4(4) 706-711 (1987)
Feihong Yu, Liren Liu, and Jeffrey A. Davis
Appl. Opt. 33(1) 42-49 (1994)