Abstract

We achieved displacement metrology with a high-amplitude signal by using a rectangular phase grating as the pupil in a grating imaging system. The imaging phenomenon with a pupil transmission grating that has a bilevel profile with a 50% duty ratio is discussed on the basis of the optical transfer function. By optimizing the imaging condition, we obtained high-contrast images with high light power under a magnified or demagnified imaging system. The amplitude of the signal in the displacement measurement was four times higher than that of the conventional grating imaging system with amplitude gratings.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Magnified grating images used in displacement sensing

Kazuhiro Hane and Chander P. Grover
Appl. Opt. 26(12) 2355-2359 (1987)

Imaging with rectangular transmission gratings

K. Hane and C. P. Grover
J. Opt. Soc. Am. A 4(4) 706-711 (1987)

Ray matrices and double-grating imaging

Feihong Yu, Liren Liu, and Jeffrey A. Davis
Appl. Opt. 33(1) 42-49 (1994)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (14)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics