Abstract

We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10° of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at 19.07nm and 64.1% at 16.53nm for the 2 and 3 orders, respectively, which are comparable to the best values obtained yet from a holographic ion-etched blazed grating. This presents opportunities to instrument designs for high-resolution EUV spectroscopy in astrophysics where high efficiency in high orders is desirable.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography

Michael P. Kowalski, William R. Hunter, and Troy W. Barbee
Appl. Opt. 45(2) 305-321 (2006)

Investigation of the properties of an ion-etched plane laminar holographic grating

William R. Hunter, Michael P. Kowalski, Jack C. Rife, and Raymond G. Cruddace
Appl. Opt. 40(34) 6157-6165 (2001)

Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, and W. R. Hunter
Opt. Lett. 29(24) 2914-2916 (2004)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription