Abstract

Nonuniformity in the thickness of thin films can severely distort their transmission spectra as compared with those of flat, smooth films. Methods that extract properties such as refractive index, thickness, and extinction coefficient of such films can suffer inaccuracies when they are applied to wedged or nonuniformly thick films. To accurately extract optical properties of nonuniform films, we have developed a novel numerical method and efficient constitutive relations that can determine film properties from just the transmission spectrum for films that are locally smooth with negligible scattering loss. This optimum parameter extraction (OPE) method can accommodate films with two-dimensional thickness variation that would result in significant errors in the values of refractive index and film thickness if not considered. We show that for carefully chosen test cases and for actual pulsed-laser-deposition AlN thin films, properties such as refractive index, extinction coefficient, and film thickness were very accurately determined by using our OPE method. These results are compared with previous techniques to determine the properties of thin films, and the accuracy of and applicable conditions for all these methods are discussed.

© 2006 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (11)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription