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Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances

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Abstract

Large mirrors (350  mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.

© 2006 Optical Society of America

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