Abstract

The optical parameters of a SiO2 thin-film coating determined from the spectral reflectance and transmittance measurements at various incidence angles, including the normal incidence and the Brewster's angle, are compared in this paper. The high-accuracy measurements were carried out through visible–near-infrared spectral regions by using our purpose-built instruments. The optical parameters obtained from the reflectance and the transmittance data are consistent over the angles of incidence and agree within 0.2%. The effect of important systematic factors in the oblique-incidence spectrophotometric measurements is also discussed.

© 2006 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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2004 (2)

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

S. Nevas, F. Manoocheri, and E. Ikonen, 'Gonioreflectometer for measuring spectral diffuse reflectance,' Appl. Opt. 43, 6391-6399 (2004).
[CrossRef] [PubMed]

2003 (1)

S. Nevas, F. Manoocheri, and E. Ikonen, 'Determination of thin film parameters from high accuracy measurements of spectral regular transmittance,' Metrologia 40, S200-S203 (2003).
[CrossRef]

2002 (1)

1999 (1)

A. Haapalinna, F. Manoochehri, and E. Ikonen, 'High-accuracy measurement of specular spectral reflectance and transmittance,' Anal. Chim. Acta 380, 317-325 (1999).
[CrossRef]

1998 (1)

1997 (1)

1995 (1)

1983 (1)

1954 (2)

Amotchkina, T. V.

Chambouleyron, I.

Dobrowolski, J. A.

Duparré, A.

Günster, S.

Haapalinna, A.

A. Haapalinna, F. Manoochehri, and E. Ikonen, 'High-accuracy measurement of specular spectral reflectance and transmittance,' Anal. Chim. Acta 380, 317-325 (1999).
[CrossRef]

Ho, F. C.

Ikonen, E.

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

S. Nevas, F. Manoocheri, and E. Ikonen, 'Gonioreflectometer for measuring spectral diffuse reflectance,' Appl. Opt. 43, 6391-6399 (2004).
[CrossRef] [PubMed]

S. Nevas, F. Manoocheri, and E. Ikonen, 'Determination of thin film parameters from high accuracy measurements of spectral regular transmittance,' Metrologia 40, S200-S203 (2003).
[CrossRef]

A. Haapalinna, F. Manoochehri, and E. Ikonen, 'High-accuracy measurement of specular spectral reflectance and transmittance,' Anal. Chim. Acta 380, 317-325 (1999).
[CrossRef]

F. Manoochehri and E. Ikonen, 'High-accuracy spectrometer for measurement of regular spectral transmittance,' Appl. Opt. 34, 3686-3692 (1995).
[CrossRef] [PubMed]

Kokarev, M.

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

Kokarev, M. A.

Manoochehri, F.

A. Haapalinna, F. Manoochehri, and E. Ikonen, 'High-accuracy measurement of specular spectral reflectance and transmittance,' Anal. Chim. Acta 380, 317-325 (1999).
[CrossRef]

F. Manoochehri and E. Ikonen, 'High-accuracy spectrometer for measurement of regular spectral transmittance,' Appl. Opt. 34, 3686-3692 (1995).
[CrossRef] [PubMed]

Manoocheri, F.

S. Nevas, F. Manoocheri, and E. Ikonen, 'Gonioreflectometer for measuring spectral diffuse reflectance,' Appl. Opt. 43, 6391-6399 (2004).
[CrossRef] [PubMed]

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

S. Nevas, F. Manoocheri, and E. Ikonen, 'Determination of thin film parameters from high accuracy measurements of spectral regular transmittance,' Metrologia 40, S200-S203 (2003).
[CrossRef]

Martinez, J. M.

Moretti, A. C.

Mulato, M.

Nenkov, M.

Nevas, S.

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

S. Nevas, F. Manoocheri, and E. Ikonen, 'Gonioreflectometer for measuring spectral diffuse reflectance,' Appl. Opt. 43, 6391-6399 (2004).
[CrossRef] [PubMed]

S. Nevas, F. Manoocheri, and E. Ikonen, 'Determination of thin film parameters from high accuracy measurements of spectral regular transmittance,' Metrologia 40, S200-S203 (2003).
[CrossRef]

Pencheva, T.

Quesnel, E.

Ristau, D.

Rodney, W. S.

Spindler, R. J.

Tikhonravov, A.

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

Tikhonravov, A. V.

Trubetskov, M.

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

Trubetskov, M. K.

Waldorf, A.

Anal. Chim. Acta (1)

A. Haapalinna, F. Manoochehri, and E. Ikonen, 'High-accuracy measurement of specular spectral reflectance and transmittance,' Anal. Chim. Acta 380, 317-325 (1999).
[CrossRef]

Appl. Opt. (5)

J. Opt. Soc. Am. (2)

J. Opt. Soc. Am. A (1)

Metrologia (1)

S. Nevas, F. Manoocheri, and E. Ikonen, 'Determination of thin film parameters from high accuracy measurements of spectral regular transmittance,' Metrologia 40, S200-S203 (2003).
[CrossRef]

Proc. SPIE (1)

S. Nevas, F. Manoocheri, E. Ikonen, A. Tikhonravov, M. Kokarev, and M. Trubetskov, 'Optical metrology of thin films using high-accuracy spectrophotometric measurements with oblique angles of incidence,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 234-242 (2004).
[CrossRef]

Other (1)

International Bureau of Weights and Measures, 'The BIPM key comparison data base. Appendix C, Calibration and measurement capabilities of National Metrology Institutes,' http://kcdb.bipm.orglowbarappendixC.

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Figures (4)

Fig. 1
Fig. 1

(a) Schematic of the reference spectrophotometer setup: OSF, order-sorting filter; M1, M2, flat mirrors; CSM1, CSM2, collimating spherical mirrors; LA, limiting aperture; OPM, off- axis parabolic mirror; SHU, sample holder unit; DVM, digital voltage meter. (b) Schematic of the gonioreflectometer setup: QTH, quartz-tungsten-halogen lamp; SPM, spherical mirror; GT1, GT2, grating turrets; OSF, order-sorting filter; M1, M2, flat mirrors; A, aperture; OPM, off-axis parabolic mirror; DP, polarizer; MD, monitor detector.

Fig. 2
Fig. 2

Transmittance spectra of the SiO2 thin-film coating on a fused-quartz substrate for 0, 10, 30, and 56.4 degree incidence angles. Solid lines and crosses represent modeled and measured spectral transmittance values, respectively. The measurements were carried out for both s and p polarization of the spectrophotometer beam.

Fig. 3
Fig. 3

Reflectance spectra of the SiO2 thin-film coating on a fused-quartz substrate for 10, 30, and 56.4 degree incidence angles. Solid lines and crosses represent modeled and measured spectral reflectance values, respectively. The measurements were carried out for both s and p polarization of the reflectometer beam.

Fig. 4
Fig. 4

Refractive indices of the SiO2 layer determined from the spectral transmittance and reflectance measurements at the oblique-incidence angles. The refractive indices yielded by the oblique-incidence reflectance and transmittance measurements agree within 0.2%.

Tables (1)

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Table 1 Comparison of the Determined SiO2 Layer Thicknesses

Equations (2)

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n ( λ ) = x 1 + x 2 λ 2 + x 3 λ 4 ,
k ( λ ) = x 4 exp ( x 5 λ ) ,

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