A dedicated spectrophotometer is built to achieve localized transmittance and reflectance measurements. The spatial resolution can be chosen from 100 µm to 2 mm, the spectral resolution from 0.5 to 5 nm, and the spectral range from 400 to 1700 nm. This apparatus can be used to study the index and thickness uniformity on single layers to determine and optimize the characteristics of the deposition chamber. It can also be used to measure the spatial variations of optical properties of intended nonuniform coatings such as linear variable filters.
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