Abstract

A dedicated spectrophotometer is built to achieve localized transmittance and reflectance measurements. The spatial resolution can be chosen from 100 µm to 2 mm, the spectral resolution from 0.5 to 5 nm, and the spectral range from 400 to 1700 nm. This apparatus can be used to study the index and thickness uniformity on single layers to determine and optimize the characteristics of the deposition chamber. It can also be used to measure the spatial variations of optical properties of intended nonuniform coatings such as linear variable filters.

© 2006 Optical Society of America

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).
  2. C. Grèzes-Besset, 'Uniformity in thin-film production,' in Thin Films for Optical Systems, F. Flory, ed. (Marcel Dekker, 1995), pp. 249.
  3. C. Grèzes-Besset, F. Chazallet, G. Albrand, and E. Pelletier, 'Synthesis and research of the optimum conditions for the optical monitoring of non-quarter-wave multilayers,' Appl. Opt. 32, 5612-5618 (1993).
  4. F. Villa and O. Pompa, 'Emission pattern of real vapour sources in high vacuum: an overview,' Appl. Opt. 38, 695-703 (1999).
  5. F. Flory, E. Pelletier, G. Albrand, and Y. Hu, 'Surface optical coatings by ion assisted deposition techniques: study of uniformity,' Appl. Opt. 28, 2952-2589 (1989).
  6. A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
    [CrossRef]

2003

A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
[CrossRef]

1999

1993

1989

1983

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

Albrand, G.

Borgogno, J. P.

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

Chazallet, F.

Flory, F.

Grèzes-Besset, C.

C. Grèzes-Besset, F. Chazallet, G. Albrand, and E. Pelletier, 'Synthesis and research of the optimum conditions for the optical monitoring of non-quarter-wave multilayers,' Appl. Opt. 32, 5612-5618 (1993).

C. Grèzes-Besset, 'Uniformity in thin-film production,' in Thin Films for Optical Systems, F. Flory, ed. (Marcel Dekker, 1995), pp. 249.

Hu, Y.

Lazaridès, B.

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

Pelletier, E.

Piegari, A.

A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
[CrossRef]

Pompa, O.

Villa, F.

Appl. Opt.

Proc. SPIE

A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
[CrossRef]

Other

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

C. Grèzes-Besset, 'Uniformity in thin-film production,' in Thin Films for Optical Systems, F. Flory, ed. (Marcel Dekker, 1995), pp. 249.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics