Abstract

A dedicated spectrophotometer is built to achieve localized transmittance and reflectance measurements. The spatial resolution can be chosen from 100μm   to   2   mm, the spectral resolution from 0.5  to  5  nm, and the spectral range from 400  to  1700  nm. This apparatus can be used to study the index and thickness uniformity on single layers to determine and optimize the characteristics of the deposition chamber. It can also be used to measure the spatial variations of optical properties of intended nonuniform coatings such as linear variable filters.

© 2006 Optical Society of America

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References

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  1. J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).
  2. C. Grèzes-Besset, 'Uniformity in thin-film production,' in Thin Films for Optical Systems, F. Flory, ed. (Marcel Dekker, 1995), pp. 249.
  3. C. Grèzes-Besset, F. Chazallet, G. Albrand, and E. Pelletier, 'Synthesis and research of the optimum conditions for the optical monitoring of non-quarter-wave multilayers,' Appl. Opt. 32, 5612-5618 (1993).
    [CrossRef]
  4. F. Villa and O. Pompa, 'Emission pattern of real vapour sources in high vacuum: an overview,' Appl. Opt. 38, 695-703 (1999).
    [CrossRef]
  5. F. Flory, E. Pelletier, G. Albrand, and Y. Hu, 'Surface optical coatings by ion assisted deposition techniques: study of uniformity,' Appl. Opt. 28, 2952-2589 (1989).
    [CrossRef] [PubMed]
  6. A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
    [CrossRef]

2003

A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
[CrossRef]

1999

1993

1989

1983

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

Albrand, G.

Borgogno, J. P.

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

Chazallet, F.

Flory, F.

Grèzes-Besset, C.

Hu, Y.

Lazaridès, B.

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

Pelletier, E.

Piegari, A.

A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
[CrossRef]

Pompa, O.

Villa, F.

Appl. Opt.

Proc. SPIE

A. Piegari, 'Metal/dielectric coatings for transmission filters with wide rejection bands,' in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE 5250, 343-348 (2003).
[CrossRef]

Other

J. P. Borgogno, B. Lazaridès, and E. Pelletier, 'Automatic determination of the optical constants of inhomogeneous thin films,' Thin Solid Films 102, 209-220 (1983).

C. Grèzes-Besset, 'Uniformity in thin-film production,' in Thin Films for Optical Systems, F. Flory, ed. (Marcel Dekker, 1995), pp. 249.

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Figures (7)

Fig. 1
Fig. 1

Schematic representation of the spectrophotometer.

Fig. 2
Fig. 2

Relative difference of the transmittance (solid curve) and the reflectance (gray curve) measured for a single high-index level on a Lambda 18 PerkinElmer spectrophotometer and on our measurement bench.

Fig. 3
Fig. 3

Thickness distribution measured on a high-index single layer. Maximum thickness is 1111 nm. Isothickness lines are drawn every 2 nm.

Fig. 4
Fig. 4

Transmittance measured on two points of a linear variable filter with a 2 mm surface analysis and a 5 nm spectral resolution. The wavelength shift across the probing zone prohibits a correct measurement of the bandpass of the filter.

Fig. 5
Fig. 5

Transmittance measured (solid curve) on two points of a linear variable filter with a 200 μm surface analysis and a 5 nm spectral resolution. For the leftmost peak, the dashed curve corresponds to the calculation of the transmittance profile, taking into account spatial and spectral integration.

Fig. 6
Fig. 6

Reflectance measured on two points of a linear variable filter with a 200 μm surface analysis and a 5 nm spectral resolution.

Fig. 7
Fig. 7

Evolution of the measured peak-transmittance bandwidth (normalized to the ideal filter characteristics) versus the normalized wavelength shift Δλbeam∕ Δλfilter due to nonuniformity across the beam diameter. The calculation is performed for a single-cavity bandpass filter.

Equations (2)

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2 ( T P E T ) / ( T P E + T ) ,
2 ( R P E R ) / ( R P E + R ) ,

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