Abstract

Transmittance of fluoride films prepared by various kinds of deposition methods is not sufficient for a vacuum-ultraviolet (VUV) stepper application. Moreover, moisture penetrates into fluoride films because of porous structures. Then the moisture reacts with the fluoride chemically, and the photoabsorption of the films increases with elapsed time. Postfluorination treatment, in which F-poor areas of fluoride films are sufficiently fluorinated and the film structures are modified to be denser, has been developed. The postfluorination treatment was performed at 0.1MPa of diluted F2 gas in a special apparatus made of nickel. This treatment reduces photoabsorption of fluoride films and prevents photoabsorption from increasing again with elapsed time. In a long-time F2 laser irradiation test, the transmittance of as-deposited fluoride films remarkably degraded with irradiation. On the other hand, there is no tendency of transmittance degradation in the case of postfluorinated fluoride films. The postfluorination is able to improve the optical performance of fluoride films, promising the highest coating level for VUV lithography.

© 2006 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Ion beam sputtering of fluoride thin films for 193 nm applications

Aiko Ode
Appl. Opt. 53(4) A330-A333 (2014)

Protected and enhanced aluminum mirrors for the VUV

S. Wilbrandt, O. Stenzel, H. Nakamura, D. Wulff-Molder, A. Duparré, and N. Kaiser
Appl. Opt. 53(4) A125-A130 (2014)

Optical properties of fluoride thin films deposited by RF magnetron sputtering

Koichiro Iwahori, Masahiro Furuta, Yusuke Taki, Tomoyuki Yamamura, and Akira Tanaka
Appl. Opt. 45(19) 4598-4602 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription