Abstract

Vacuum-ultraviolet (VUV) narrow-bandpass filters with central wavelengths at 177.5, 180.7, and 193nm are necessary for analytical chemistry applications and for atomic emission spectrum separation. The emission spectra are so close that the required passbands of these filters are 1 to 2nm with a maximum of 2nm. We first investigated the designs based on the Fabry–Perot model with fluoride materials and second the deposition of narrow-bandpass filter components by using evaporation deposition. VUV spectral characterizations show that the filter components meet the requirements for analytical chemistry applications.

© 2006 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
    [CrossRef]
  2. W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
    [CrossRef]
  3. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001), pp. 158-178.
    [CrossRef]
  4. R. Thielsch, 'Optical coatings for the DUV/VUV,' in Interference Coatings, N. Kaiser and H. K. Pulker, eds., Vol. 88 of Springer Series in Optical Sciences (Springer, 2003), pp. 257-279.
  5. A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Gunster, J. Kohlhaas, M. Marsi, M. Trovo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, and C. Amra, 'High-performance deep-ultraviolet optics for free-electron lasers,' Appl. Opt. 41, 3236-3241 (2002).
    [CrossRef] [PubMed]
  6. N. Kaiser, 'Review of the fundamentals of thin-film growth,' Appl. Opt. 41, 3053-3060 (2002).
    [CrossRef] [PubMed]
  7. J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhas, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 544-548 (2002).
    [CrossRef]
  8. U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
    [CrossRef]
  9. H. Günther, 'Structure and related properties of thin-film optical coatings,' in Optical Thin Films II, R. I. Seddon, ed., Proc. SPIE 678, 2-11 (1986).

2003

M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
[CrossRef]

2002

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Gunster, J. Kohlhaas, M. Marsi, M. Trovo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, and C. Amra, 'High-performance deep-ultraviolet optics for free-electron lasers,' Appl. Opt. 41, 3236-3241 (2002).
[CrossRef] [PubMed]

N. Kaiser, 'Review of the fundamentals of thin-film growth,' Appl. Opt. 41, 3053-3060 (2002).
[CrossRef] [PubMed]

J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhas, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 544-548 (2002).
[CrossRef]

1992

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

1986

H. Günther, 'Structure and related properties of thin-film optical coatings,' in Optical Thin Films II, R. I. Seddon, ed., Proc. SPIE 678, 2-11 (1986).

Alvisi, M.

Amra, C.

Chen, Q.

M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
[CrossRef]

Couprie, M. E.

Davis, W. C.

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

Dempster, A.

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

Garzella, D.

Gatto, A.

J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhas, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 544-548 (2002).
[CrossRef]

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Gunster, J. Kohlhaas, M. Marsi, M. Trovo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, and C. Amra, 'High-performance deep-ultraviolet optics for free-electron lasers,' Appl. Opt. 41, 3236-3241 (2002).
[CrossRef] [PubMed]

Gunster, S.

Günther, H.

H. Günther, 'Structure and related properties of thin-film optical coatings,' in Optical Thin Films II, R. I. Seddon, ed., Proc. SPIE 678, 2-11 (1986).

Hacker, E.

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

Heber, J.

J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhas, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 544-548 (2002).
[CrossRef]

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Gunster, J. Kohlhaas, M. Marsi, M. Trovo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, and C. Amra, 'High-performance deep-ultraviolet optics for free-electron lasers,' Appl. Opt. 41, 3236-3241 (2002).
[CrossRef] [PubMed]

Jin, F.

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

Kaiser, N.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Gunster, J. Kohlhaas, M. Marsi, M. Trovo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, and C. Amra, 'High-performance deep-ultraviolet optics for free-electron lasers,' Appl. Opt. 41, 3236-3241 (2002).
[CrossRef] [PubMed]

N. Kaiser, 'Review of the fundamentals of thin-film growth,' Appl. Opt. 41, 3053-3060 (2002).
[CrossRef] [PubMed]

J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhas, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 544-548 (2002).
[CrossRef]

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

Kaiser, U.

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

Kohlhaas, J.

Liu, J.

M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
[CrossRef]

Macleod, H. A.

H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001), pp. 158-178.
[CrossRef]

Mademann, U.

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

Marcus, R. K.

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

Marsi, M.

Müller, H.

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

Ristau, D.

Robichaud, J. L.

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

Thielsch, R.

Torchio, P.

Trovo, M.

Walker, R.

Weissbrodt, P.

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

Yang, M.

M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
[CrossRef]

Zhang, B.

M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
[CrossRef]

Appl. Opt.

J. Anal. At. Spectrom.

W. C. Davis, F. Jin, A. Dempster, J. L. Robichaud, and R. K. Marcus, 'Development of a new liquid chromatography method for the separation and speciation of organic and inorganic selenium compounds via particle beam-hollow cathode glow discharge-optical emission spectroscopy,' J. Anal. At. Spectrom. 17, 99-103 (2002).
[CrossRef]

Proc. SPIE

H. Günther, 'Structure and related properties of thin-film optical coatings,' in Optical Thin Films II, R. I. Seddon, ed., Proc. SPIE 678, 2-11 (1986).

J. Heber, A. Gatto, and N. Kaiser, 'Spectrophotometer in the vacuum UV,' in Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, G. J. Exarhas, A. H. Guenther, N. Kaiser, K. L. Lewis, M. J. Soileau, C. J. Stolz, A. Giesen, and H. Weber, eds., Proc. SPIE 4932, 544-548 (2002).
[CrossRef]

Thin Solid Films

U. Kaiser, N. Kaiser, P. Weissbrodt, U. Mademann, E. Hacker, and H. Müller, 'Structure of thin fluoride films deposited on amourphous substrates,' Thin Solid Films 217, 7-16 (1992).
[CrossRef]

M. Yang, J. Liu, Q. Chen, and B. Zhang, 'Design of 25 GHz thin film filter with a third high refractive index materials as cavity layers,' Thin Solid Films 425, 193-195 (2003).
[CrossRef]

Other

H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001), pp. 158-178.
[CrossRef]

R. Thielsch, 'Optical coatings for the DUV/VUV,' in Interference Coatings, N. Kaiser and H. K. Pulker, eds., Vol. 88 of Springer Series in Optical Sciences (Springer, 2003), pp. 257-279.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Theorectical design of VUV narrow-bandpass filters with central wavelengths of 177.5, 180.7, and 193 nm , which are necessary for analytical chemistry applications.

Fig. 2
Fig. 2

Filter spectrum shaping of a VUV narrow-bandpass filter by adjustment of design characters, including the stack number in the mirror layers and the cavity number in the total structure.

Fig. 3
Fig. 3

Optical constants of fluoride materials extracted from the measurements: N, refractive index; k, absorption coefficient.

Fig. 4
Fig. 4

Transmittance (T) and reflectance (R) of the deposited VUV bandpass filter with a single-cavity structure.

Tables (1)

Tables Icon

Table 1 Specifications of Calculated 193 nm VUV Narrow-Bandpass Filters

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

Y = sub ( HL ) n 2 * i H ( LH ) n ( LH ) m 2 * j L ( HL ) m air ,

Metrics