Abstract

A method for the remote comparison of objects with regard to their shape or response to a load is presented. The method allows interferometric sensitivity for comparing objects with different microstructure. In contrast to the well-known incoherent techniques based on inverse fringe projection this new approach uses the coherent optical wave field of the master object as a mask for the illumination of the sample object. The coherent mask is created by digital holography to allow instant access to the complete optical information of the master object at any place desired. The mask is reconstructed by a spatial light modulator (SLM). The optical reconstruction of digital holograms with SLM technology allows modification of reconstructed wavefronts with respect to improvement of image quality, the skilled introduction of additional information about the object (augmented reality), and the alignment of the master and test object.

© 2006 Optical Society of America

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References

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  1. W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.
  2. D. B. Neumann, "Comparative holography," in Digest of Topical Meeting on Hologram Interferometry and Speckle Metrology (Optical Society of America, 1980), paper MB2-1.
  3. Z. Füzessy and F. Gymesi, "Difference holographic interferometry: displacement measurement," Opt. Eng. 23, 780-783 (1984).
  4. F. Gymesi and Z. Füzessy, "Difference holographic interferometry (DHI): two-refractive index contouring," Opt. Commun. 53, 17-22 (1985).
    [CrossRef]
  5. Z. Füzessy and F. Gymesi, "Difference holographic interferometry (DHI): phase object measurement," Opt. Commun. 57, 31-35 (1986).
    [CrossRef]
  6. U. Schnars, "Direct phase determination in hologram interferometry with use of digitally recorded holograms," J. Opt. Soc. Am. A 11, 2011-2015 (1994).
    [CrossRef]
  7. C. Wagner, W. Osten, and S. Seebacher, "Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring," Opt. Eng. 39, 79-85 (2000).
    [CrossRef]
  8. W. Osten, T. Baumbach, and W. Jüptner, "Comparative digital holography," Opt. Lett. 27, 1764-1766 (2002).
    [CrossRef]
  9. T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
    [CrossRef]
  10. D. B. Neumann, "Comparative holography: a technique for eliminating background fringes in holographic interferometry," Opt. Eng. 24, 625-627 (1985).
  11. T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
    [CrossRef]
  12. Chr. Wagner, S. Seebacher, W. Osten, and W. Jüptner, "Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology," Appl. Opt. 38, 4812-4820 (1999).
    [CrossRef]
  13. B. P. Hildebrand and K. A. Haines, "Multiple-wavelength and multiple-source holography applied to contour generation," J. Opt. Soc. Am. A 57, 155-162 (1967).
    [CrossRef]

2004

T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
[CrossRef]

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

2002

2001

W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.

2000

C. Wagner, W. Osten, and S. Seebacher, "Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring," Opt. Eng. 39, 79-85 (2000).
[CrossRef]

1999

1994

1986

Z. Füzessy and F. Gymesi, "Difference holographic interferometry (DHI): phase object measurement," Opt. Commun. 57, 31-35 (1986).
[CrossRef]

1985

D. B. Neumann, "Comparative holography: a technique for eliminating background fringes in holographic interferometry," Opt. Eng. 24, 625-627 (1985).

F. Gymesi and Z. Füzessy, "Difference holographic interferometry (DHI): two-refractive index contouring," Opt. Commun. 53, 17-22 (1985).
[CrossRef]

1984

Z. Füzessy and F. Gymesi, "Difference holographic interferometry: displacement measurement," Opt. Eng. 23, 780-783 (1984).

1980

D. B. Neumann, "Comparative holography," in Digest of Topical Meeting on Hologram Interferometry and Speckle Metrology (Optical Society of America, 1980), paper MB2-1.

1967

B. P. Hildebrand and K. A. Haines, "Multiple-wavelength and multiple-source holography applied to contour generation," J. Opt. Soc. Am. A 57, 155-162 (1967).
[CrossRef]

Baumbach, T.

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
[CrossRef]

W. Osten, T. Baumbach, and W. Jüptner, "Comparative digital holography," Opt. Lett. 27, 1764-1766 (2002).
[CrossRef]

W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.

Füzessy, Z.

Z. Füzessy and F. Gymesi, "Difference holographic interferometry (DHI): phase object measurement," Opt. Commun. 57, 31-35 (1986).
[CrossRef]

F. Gymesi and Z. Füzessy, "Difference holographic interferometry (DHI): two-refractive index contouring," Opt. Commun. 53, 17-22 (1985).
[CrossRef]

Z. Füzessy and F. Gymesi, "Difference holographic interferometry: displacement measurement," Opt. Eng. 23, 780-783 (1984).

Gymesi, F.

Z. Füzessy and F. Gymesi, "Difference holographic interferometry (DHI): phase object measurement," Opt. Commun. 57, 31-35 (1986).
[CrossRef]

F. Gymesi and Z. Füzessy, "Difference holographic interferometry (DHI): two-refractive index contouring," Opt. Commun. 53, 17-22 (1985).
[CrossRef]

Z. Füzessy and F. Gymesi, "Difference holographic interferometry: displacement measurement," Opt. Eng. 23, 780-783 (1984).

Haines, K. A.

B. P. Hildebrand and K. A. Haines, "Multiple-wavelength and multiple-source holography applied to contour generation," J. Opt. Soc. Am. A 57, 155-162 (1967).
[CrossRef]

Hildebrand, B. P.

B. P. Hildebrand and K. A. Haines, "Multiple-wavelength and multiple-source holography applied to contour generation," J. Opt. Soc. Am. A 57, 155-162 (1967).
[CrossRef]

Jüptner, W.

T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
[CrossRef]

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

W. Osten, T. Baumbach, and W. Jüptner, "Comparative digital holography," Opt. Lett. 27, 1764-1766 (2002).
[CrossRef]

W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.

Chr. Wagner, S. Seebacher, W. Osten, and W. Jüptner, "Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology," Appl. Opt. 38, 4812-4820 (1999).
[CrossRef]

Kebbel, V.

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

Neumann, D. B.

D. B. Neumann, "Comparative holography: a technique for eliminating background fringes in holographic interferometry," Opt. Eng. 24, 625-627 (1985).

D. B. Neumann, "Comparative holography," in Digest of Topical Meeting on Hologram Interferometry and Speckle Metrology (Optical Society of America, 1980), paper MB2-1.

Osten, W.

T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
[CrossRef]

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

W. Osten, T. Baumbach, and W. Jüptner, "Comparative digital holography," Opt. Lett. 27, 1764-1766 (2002).
[CrossRef]

W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.

C. Wagner, W. Osten, and S. Seebacher, "Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring," Opt. Eng. 39, 79-85 (2000).
[CrossRef]

Chr. Wagner, S. Seebacher, W. Osten, and W. Jüptner, "Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology," Appl. Opt. 38, 4812-4820 (1999).
[CrossRef]

Schnars, U.

Seebacher, S.

W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.

C. Wagner, W. Osten, and S. Seebacher, "Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring," Opt. Eng. 39, 79-85 (2000).
[CrossRef]

Chr. Wagner, S. Seebacher, W. Osten, and W. Jüptner, "Digital recording and numerical reconstruction of lensless Fourier holograms in optical metrology," Appl. Opt. 38, 4812-4820 (1999).
[CrossRef]

von Kopylow, C.

T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
[CrossRef]

von Kopylow, Ch.

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

Wagner, C.

C. Wagner, W. Osten, and S. Seebacher, "Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring," Opt. Eng. 39, 79-85 (2000).
[CrossRef]

Wagner, Chr.

Appl. Opt.

J. Opt. Soc. Am. A

B. P. Hildebrand and K. A. Haines, "Multiple-wavelength and multiple-source holography applied to contour generation," J. Opt. Soc. Am. A 57, 155-162 (1967).
[CrossRef]

U. Schnars, "Direct phase determination in hologram interferometry with use of digitally recorded holograms," J. Opt. Soc. Am. A 11, 2011-2015 (1994).
[CrossRef]

Opt. Commun.

F. Gymesi and Z. Füzessy, "Difference holographic interferometry (DHI): two-refractive index contouring," Opt. Commun. 53, 17-22 (1985).
[CrossRef]

Z. Füzessy and F. Gymesi, "Difference holographic interferometry (DHI): phase object measurement," Opt. Commun. 57, 31-35 (1986).
[CrossRef]

Opt. Eng.

D. B. Neumann, "Comparative holography: a technique for eliminating background fringes in holographic interferometry," Opt. Eng. 24, 625-627 (1985).

Z. Füzessy and F. Gymesi, "Difference holographic interferometry: displacement measurement," Opt. Eng. 23, 780-783 (1984).

C. Wagner, W. Osten, and S. Seebacher, "Direct shape measurement by digital wavefront reconstruction and multiwavelength contouring," Opt. Eng. 39, 79-85 (2000).
[CrossRef]

Opt. Lett.

Proc. SPIE

T. Baumbach, W. Osten, V. Kebbel, Ch. von Kopylow, and W. Jüptner, "Set-up calibration and optimization for comparative digital holography," in Interferometry XII,Proc. SPIE 5532, 16-27 (2004).
[CrossRef]

T. Baumbach, W. Osten, C. von Kopylow, and W. Jüptner, "Application of comparative digital holography for distant shape control," in Optical Metrology in Production Engineering,Proc. SPIE 5457, 598-609 (2004).
[CrossRef]

Other

W. Osten, T. Baumbach, S. Seebacher, and W. Jüptner, "Remote shape control by digital holography," in Fringe 2001: Proceedings of the 4th International Workshop on Automatic Processing of Fringe Patterns, W. Osten and W. Jüptner, eds. (Elsevier, 2001), pp. 373-382.

D. B. Neumann, "Comparative holography," in Digest of Topical Meeting on Hologram Interferometry and Speckle Metrology (Optical Society of America, 1980), paper MB2-1.

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Figures (22)

Fig. 1
Fig. 1

Schematic representation of the light path during the recording of the master wavefront (left) and during the comparison with the test object (right).

Fig. 2
Fig. 2

Schematic presentation of the experimental setup for recording the coherent mask in CDH.

Fig. 3
Fig. 3

Schematic presentation of the experimental setup for recording the test object with coherent illumination of the sample by the conjugated wavefront of the master in CDH.

Fig. 4
Fig. 4

Experimental setup for CDH using a LCOS display for the reconstruction of the master object.

Fig. 5
Fig. 5

Images of the step pyramids used (top view of master and test object).

Fig. 6
Fig. 6

Resultant phase difference of a CDH shape measurement between two step pyramids (left) and 3D presentation difference (right).

Fig. 7
Fig. 7

Phase difference between two German coins (left) and a German and a French coin (right).

Fig. 8
Fig. 8

Result of difference measurement between a German and a French 20 Euro cent coin with CDH (left) and by triangulation (right).

Fig. 9
Fig. 9

Setup geometry for comparison of the master and test object with the two-source point method.

Fig. 10
Fig. 10

Shape difference between the master and the test object achieved by the CDH two-source point method. Left-hand side, without tilt compensation; right-hand side, with tilt compensation.

Fig. 11
Fig. 11

Front view (left) and side view (right) of the object mount.

Fig. 12
Fig. 12

Deformation of the master object (left) and the test object (right).

Fig. 13
Fig. 13

Deformation difference between the master and the test object.

Fig. 14
Fig. 14

Image of the adapted illuminated area at which the shape of the step pyramids differ from each other.

Fig. 15
Fig. 15

Intensity of the reconstructed master object (left) and intensity of the reconstructed test object illuminated with the image of the master (right).

Fig. 16
Fig. 16

Flow chart of the method for adapting the intensity of the reconstruction.

Fig. 17
Fig. 17

Reconstructed image of the master object after modifying the hologram (left) and intensity of the reconstructed test object illuminated with the image of the master after modifying the hologram (right).

Fig. 18
Fig. 18

CDH result without (left) and with (right) adapted intensity of the reconstructed master wavefront.

Fig. 19
Fig. 19

Reconstructed intensity (left) of a hologram (right).

Fig. 20
Fig. 20

Reconstructed shifted intensity (left) and the hologram used (right).

Fig. 21
Fig. 21

Image of the object type used (left) and intensity reconstruction of the test object (right).

Fig. 22
Fig. 22

Alignment by wavefront shifting horizontally and vertically misaligned master and test objects (left), horizontal alignment (middle), and complete alignment (right).

Equations (36)

Equations on this page are rendered with MathJax. Learn more.

( λ 1
λ 2
( λ 1
λ 2
Φ 2 T Φ 1 T = 2 π Λ [ e 1 ( P ) + e 2 ( P ) ] ( r P T r P M ) ,
λ 1
λ 2
Λ = λ 1 λ 2 λ 2 λ 1 .
r P T
r P M
S = grad ( Φ 2 T Φ 1 T ) = 2 π Λ [ e 1 ( P ) + e 2 ( P ) ],
Φ 2 T Φ 1 T = S ( r P T r P M ) .
Λ e f f
Λ e f f = Λ [ e 1 ( P ) + e 2 ( P ) ] .
13.5   mm
10.5   mm
183 μ m
Λ = 86 μ m
λ 1 = 580   nm
λ 2 = 585   nm
e 1
e 2 ,
Λ e f f
35  μ m
Δ Φ
227 μ m
584  nm
Λ = 84 μ m
2 π
43 μ m
2 π
43 μ m
32   mm
532   nm
266   nm
λ / 4   to   λ / 5

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