Abstract

A space-charge buildup under the blocking mask in a field-assisted Ag+Na+ ion-exchange modeling is assumed. It results in the distortion of electric field lines in the direction under the mask edges. As a result, side diffusion occurs and the numerical model shows the same range of side diffusion as the experimental data. Explicit consideration of the space-charge buildup under the mask and solving the Poisson equation for the electric field determination make it possible to use more realistic boundary conditions in the numerical model, compared to the boundary conditions generally used.

© 2006 Optical Society of America

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