Abstract

TiO2-Ta2O5 composite films were prepared by a radio frequency ion-beam sputtering deposition process, and the refractive indices and extinction coefficients of the composite films were found to be between those of the TiO2 and Ta2O5 films. The structure of the as-deposited films was amorphous, and the surface roughness was approximately 0.1 nm. The residual stress of the composite films was less than that of pure TiO2 film. The structure of the composite films after annealing was amorphous, with low surface roughness and slightly increased residual stress. The film containing 6.3% TiO2 displayed better properties than either the pure TiO2 or the pure Ta2O5 film.

© 2006 Optical Society of America

PDF Article
OSA Recommended Articles
Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Kun-Hsien Lee, and Cheng-Chung Lee
Appl. Opt. 50(9) C62-C68 (2011)

Annealing dependence of residual stress and optical properties of TiO2 thin film deposited by different deposition methods

Hsi-Chao Chen, Kuan-Shiang Lee, and Cheng-Chung Lee
Appl. Opt. 47(13) C284-C287 (2008)

Optical, structural, and mechanical properties of silicon oxynitride films prepared by pulsed magnetron sputtering

Chien-Jen Tang, Cheng-Chung Jaing, Chuen-Lin Tien, Wei-Chiang Sun, and Shih-Chin Lin
Appl. Opt. 56(4) C168-C174 (2017)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription