Abstract

A processing technique using femtosecond laser pulses to microstructure the surface of a silicon avalanche photodiode (APD) has been used to enhance its near-infrared (near-IR) response. Experiments were performed on a series of APDs and APD arrays using various structuring parameters and poststructuring annealing sequences. Following thermal annealing, we were able to fabricate APD arrays with quantum efficiencies as high as 58% at 1064 nm without degradation of their noise or gain performance. Experimental results provided evidence to suggest that the improvement in charge collection is a result of increased absorption in the near-IR.

© 2006 Optical Society of America

Full Article  |  PDF Article
Related Articles
Performance of InGaAs/InP avalanche photodiodes as gated-mode photon counters

Grégoire Ribordy, Jean-Daniel Gautier, Hugo Zbinden, and Nicolas Gisin
Appl. Opt. 37(12) 2272-2277 (1998)

Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes

James E. Carey, Catherine H. Crouch, Mengyan Shen, and Eric Mazur
Opt. Lett. 30(14) 1773-1775 (2005)

Optical sensors based on III-nitride photodetectors for flame sensing and combustion monitoring

Jose Luis Pau, Javier Anduaga, Carlos Rivera, Álvaro Navarro, Isabel Álava, Marcos Redondo, and Elías Muñoz
Appl. Opt. 45(28) 7498-7503 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription