Abstract

The fringe patterns seen when using moiré instruments are similar to the patterns seen in traditional interferometry but differ in the spacing between consecutive fringes. In traditional interferometry, the spacing is constant and related to the wavelength of the source. In moiré fringe projection, the spacing (the effective wavelength) may not be constant over the field of view and the spacing depends on the system geometry. In these cases, using a constant effective wavelength over the field of view causes inaccurate surface height measurements. We examine the calibration process of the moiré fringe projection measurement, which takes this varying wavelength into account to produce a pixel-by-pixel wavelength map. The wavelength calibration procedure is to move the object in the out-of-plane direction a known distance until every pixel intensity value goes through at least one cycle. A sinusoidal function is then fit to the data to extract the effective wavelength pixel by pixel, yielding an effective wavelength map. A calibrated step height was used to validate the effective wavelength map with results within 1% of the nominal value of the step height. The error sources that contributed to the uncertainty in determining the height of the artifact are also investigated.

© 2006 Optical Society of America

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