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Quasi-absolute measurement of aspheres with a combined diffractive optical element as reference

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Abstract

We have already reported a method for the quasi-absolute test of rotationally symmetric aspheres by means of combined diffractive optical elements (combo-DOEs). The combo-DOEs carry the information for the ideal shape of an aspheric surface under test as well as a spherical wave for the measurement at the cat's eye position. An experimental demonstration of the procedure is given. Measurements with two different designs of combo-DOEs have been conducted, and their relative advantages and disadvantages are discussed.

© 2006 Optical Society of America

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