Abstract

A new surface profiling algorithm called the local model fitting (LMF) method is proposed. LMF is a single-shot method that employs only a single image, so it is fast and robust against vibration. LMF does not require a conventional assumption of smoothness of the target surface in a band-limit sense, but we instead assume that the target surface is locally constant. This enables us to recover sharp edges on the surface. LMF employs only local image data, so objects covered with heterogeneous materials can also be measured. The LMF algorithm is simple to implement and is efficient in computation. Experimental results showed that the proposed LMF method works very well.

© 2006 Optical Society of America

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