Abstract

The focusability of multiple high-order harmonics in the extreme-ultraviolet and soft-x-ray regions is described, together with the design and performance of the ellipsoidal mirror used for this purpose. The mirror focuses intense coherent light in the spectral-region from 25 to 40  nm into a 2.4μm spot size with a focused peak intensity of 6×1013  W/cm2. The focal images indicate that a good beam profile is obtained with a near-Gaussian distribution and a beam quality factor (M2 value) as low as 2.4.

© 2006 Optical Society of America

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