Abstract

Dark-field illumination provides an imaging mode that rejects specular light, thereby highlighting edge features. We analyze dark-field imaging by using cylindrical vector beam illumination with a confocal microscope equipped with a microstructure fiber mode filter. A numerical model based on rigorous coupled-wave analysis has been used to analyze the method. We acquired images of separated edges features to investigate the edge separation resolution of the method. A through-focus comparison of azimuthal and radial polarization shows a measurable dependence of edge separation on polarization.

© 2006 Optical Society of America

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