L. Seifert, H. J. Tiziani, and W. Osten, "Wavefront reconstruction with the adaptive Shack-Hartmann sensor," Opt. Commun. 245, 255-269 (2005).

[CrossRef]

L. Seifert, J. Liesener, and H. J. Tiziani, "The adaptive Shack-Hartmann sensor," Opt. Commun. 216, 313-319 (2003).

[CrossRef]

R. R. Rammage, D. R. Neal, and R. J. Copland, "Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology," in Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, A. Duparré and B. Singh, eds., Proc. SPIE 4779, 161-172 (2002).

[CrossRef]

J. Arasa, S. Royo, and N. Tomás, "Simple method for improving the sampling in profile measurements by use of the Ronchi test," Appl. Opt. 39, 4529-4534 (2000).

S. Royo, J. Arasa, and C. Pizarro, "Profilometry of toroidal surfaces with an improved Ronchi test," Appl. Opt. 39, 5721-5731 (2000).

J. Arasa, S. Royo, and N. Tomás, "Simple method for improving the sampling in profile measurements by use of the Ronchi test," Appl. Opt. 39, 4529-4534 (2000).

S. Royo, J. Arasa, and C. Pizarro, "Profilometry of toroidal surfaces with an improved Ronchi test," Appl. Opt. 39, 5721-5731 (2000).

R. R. Rammage, D. R. Neal, and R. J. Copland, "Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology," in Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, A. Duparré and B. Singh, eds., Proc. SPIE 4779, 161-172 (2002).

[CrossRef]

C. de Boor, A Practical Guide to Splines, revised edition (Springer-Verlag, 2001).

D. Malacara and S. L. DeVore, "Interferogram evaluation and wavefront fitting," in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, 1992).

K. W. Farmer, "Scattered data interpolation by C quintic splines using energy minimization," M. A. thesis (University of Georgia, 1997).

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1997).

X. Liu and Y. Gao, "B-spline based wavefront reconstruction for lateral shearing interferometric measurement of engineering surfaces," Advances in Abrasive Technology V (Trans Tech Publications, 2003), Vol. 238-239, pp. 169-174.

C. L. Lawson and R. J. Hanson, Solving Least Square Problems (Prentice Hall, 1974).

C. L. Lawson and R. J. Hanson, Solving Least Square Problems (Prentice Hall, 1974).

L. Seifert, J. Liesener, and H. J. Tiziani, "The adaptive Shack-Hartmann sensor," Opt. Commun. 216, 313-319 (2003).

[CrossRef]

X. Liu and Y. Gao, "B-spline based wavefront reconstruction for lateral shearing interferometric measurement of engineering surfaces," Advances in Abrasive Technology V (Trans Tech Publications, 2003), Vol. 238-239, pp. 169-174.

D. Malacara and S. L. DeVore, "Interferogram evaluation and wavefront fitting," in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, 1992).

R. R. Rammage, D. R. Neal, and R. J. Copland, "Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology," in Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, A. Duparré and B. Singh, eds., Proc. SPIE 4779, 161-172 (2002).

[CrossRef]

L. Seifert, H. J. Tiziani, and W. Osten, "Wavefront reconstruction with the adaptive Shack-Hartmann sensor," Opt. Commun. 245, 255-269 (2005).

[CrossRef]

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1997).

R. R. Rammage, D. R. Neal, and R. J. Copland, "Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology," in Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, A. Duparré and B. Singh, eds., Proc. SPIE 4779, 161-172 (2002).

[CrossRef]

S. Royo, J. Arasa, and C. Pizarro, "Profilometry of toroidal surfaces with an improved Ronchi test," Appl. Opt. 39, 5721-5731 (2000).

J. Arasa, S. Royo, and N. Tomás, "Simple method for improving the sampling in profile measurements by use of the Ronchi test," Appl. Opt. 39, 4529-4534 (2000).

L. Seifert, H. J. Tiziani, and W. Osten, "Wavefront reconstruction with the adaptive Shack-Hartmann sensor," Opt. Commun. 245, 255-269 (2005).

[CrossRef]

L. Seifert, J. Liesener, and H. J. Tiziani, "The adaptive Shack-Hartmann sensor," Opt. Commun. 216, 313-319 (2003).

[CrossRef]

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1997).

L. Seifert, H. J. Tiziani, and W. Osten, "Wavefront reconstruction with the adaptive Shack-Hartmann sensor," Opt. Commun. 245, 255-269 (2005).

[CrossRef]

L. Seifert, J. Liesener, and H. J. Tiziani, "The adaptive Shack-Hartmann sensor," Opt. Commun. 216, 313-319 (2003).

[CrossRef]

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1997).

G. Vdovin and P. M. Sarro, "Flexible mirror micromachined in silicon," Appl. Opt. 34, 2968-2972 (1995).

J. Arasa, S. Royo, and N. Tomás, "Simple method for improving the sampling in profile measurements by use of the Ronchi test," Appl. Opt. 39, 4529-4534 (2000).

S. Royo, J. Arasa, and C. Pizarro, "Profilometry of toroidal surfaces with an improved Ronchi test," Appl. Opt. 39, 5721-5731 (2000).

L. Seifert, J. Liesener, and H. J. Tiziani, "The adaptive Shack-Hartmann sensor," Opt. Commun. 216, 313-319 (2003).

[CrossRef]

L. Seifert, H. J. Tiziani, and W. Osten, "Wavefront reconstruction with the adaptive Shack-Hartmann sensor," Opt. Commun. 245, 255-269 (2005).

[CrossRef]

R. R. Rammage, D. R. Neal, and R. J. Copland, "Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology," in Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, A. Duparré and B. Singh, eds., Proc. SPIE 4779, 161-172 (2002).

[CrossRef]

K. W. Farmer, "Scattered data interpolation by C quintic splines using energy minimization," M. A. thesis (University of Georgia, 1997).

X. Liu and Y. Gao, "B-spline based wavefront reconstruction for lateral shearing interferometric measurement of engineering surfaces," Advances in Abrasive Technology V (Trans Tech Publications, 2003), Vol. 238-239, pp. 169-174.

D. Malacara and S. L. DeVore, "Interferogram evaluation and wavefront fitting," in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, 1992).

C. de Boor, A Practical Guide to Splines, revised edition (Springer-Verlag, 2001).

C. L. Lawson and R. J. Hanson, Solving Least Square Problems (Prentice Hall, 1974).

W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C, 2nd ed. (Cambridge U. Press, 1997).