Abstract

W∕C and Co/SiO2 multilayer gratings have been fabricated by depositing a multilayer coating on the surface of laminar-type holographic master gratings. The diffraction efficiency was measured by reflectometers in the energy region of 0.68.0  keV at synchrotron radiation facilities as well as with an x-ray diffractometer at 8.05   keV. The Co/SiO2 and W∕C multilayer gratings showed peak diffraction efficiencies of 0.47 and 0.38 at 6.0 and 8.0   keV, respectively. To our knowledge, the peak efficiency of the W∕C multilayer grating is the highest measured with hard x rays. The diffraction efficiency of the Co/SiO2 multilayer gratings was higher than that of the W∕C multilayer grating in the energy range of 2.56.0  keV. However, it decreased significantly in the energy above the K absorption edge of Co (7.71   keV). For the Co/SiO2 multilayer grating, the measured diffraction efficiencies agreed with the calculated curves assuming a rms roughness of 1  nm.

© 2006 Optical Society of America

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