Abstract

Surface-relief gratings with submicrometer modulation periods were ablated by F2-laser radiation in thin metal-oxide films to produce resonant grating waveguide structures. For 150  nm films of Nb2O 5, grating amplitudes in the range of 5–50  nm could be reproducibly excised with a controlled exposure of a laser energy density and a number of pulses within a narrow processing window. Resonant coupling of 800   nm ultrashort pulsed laser light into the resulting grating waveguide structure is verified with reflection and transmission spectra and satisfactorily modeled by coupled-mode theory. The laser-fabricated grating waveguides are attractive for high damage threshold reflectors and biosensor applications.

© 2006 Optical Society of America

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