Abstract

An integrated three-dimensional optical multilayer system for optical data communications is presented. It is based on the use of free-space optical light propagation and combines two integration principles, namely, planar and stacked integration. The combination of both integration schemes aims at a maximal design flexibility for complex geometric layouts. On the other hand, packaging issues that stem from assembly and tolerance have to be considered. Here we describe the basic concept and demonstrate the implementation of an optical interface module in a processor-memory bus.

© 2006 Optical Society of America

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  1. D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000).
    [CrossRef]
  2. C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).
  3. H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).
  4. S. J. Walker and J. Jahns, "Optical clock distribution using integrated free-space optics," Opt. Commun. 90, 359-371 (1992).
    [CrossRef]
  5. A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
    [CrossRef]
  6. C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
    [CrossRef]
  7. G. Li, D. Huang, E. Yuceturk, P. J. Marchand, S. C. Esener, V. H. Ozguz, and Y. Liu, "Three-dimensional optoelectronic stacked processor by use of free-space optical interconnection and three-dimensional VLSI chip stacks," Appl. Opt. 41, 348-360 (2002).
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    [CrossRef]
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  12. R. Klug and K.-H. Brenner, "Implementation of multilens micro-optical systems with large numerical aperture by stacking of microlenses," Appl. Opt. 38, 7002-7008 (1999).
    [CrossRef]
  13. M. Gruber, R. Kerssenfischer, and J. Jahns, "Cascadable fan-out module for parallel optical short-haul interconnects," in Proceedings of the OSA Topical Meeting on Optics in Computing 2003 (Optical Society of America, 2003).
  14. T. Shiono and H. Ogawa, "Planar-optic-disk pickup with diffractive micro-optics," Appl. Opt. 33, 7350-7355 (1994).
    [CrossRef] [PubMed]
  15. M. Gruber, J. Jahns, and S. Sinzinger, "Planar-integrated optical vector-matrix multiplier," Appl. Opt. 39, 5367-5373 (2000).
    [CrossRef]
  16. E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).
  17. V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
    [CrossRef]
  18. A. Huang and J. Jahns, "Mask controlled coupling of inter-substrate optical components," U.S. patent 4,966,446 (30 October 1990).
  19. M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).
  20. A. W. Lohmann, "Image formation of dilute arrays for optical information processing," Opt. Commun. 86, 365-370 (1991).
    [CrossRef]
  21. S. Sinzinger and J. Jahns, Microoptics (Wiley-VCH, 1999), Chap. 7.2.
  22. J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).
  23. R. Bathel, S. Sinzinger, and J. Jahns, "Ray-tracing analysis of planar optical systems," in OSA Topical Meeting on Diffractive Optics and Microoptics (Optical Society of America, 2000), pp. 145-146.
  24. M. Jarczynski and J. Jahns, "Planar free-space optical interface module based on a hybrid imaging system," in EOS Topical Meeting, Optics in Computing 2003 (European Optical Society, 2004), pp. 21-23.
  25. M. Jarczynski and J. Jahns, "Planar-integrated free-space optics for optical interconnects and fan-out/in operations," in Photonic Devices and Algorithms for Computing VI, K. M. Iftekharuddin and A. A. S. Awwal, eds., Proc. SPIE 5556,15-26 (2004).
  26. M. Gruber, D. Hagedorn, and W. Eckert, "Precise and simple optical alignment method for double-sided lithography," Appl. Opt. 40, 5052-5055 (2001).
    [CrossRef]
  27. R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

2004 (1)

V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
[CrossRef]

2003 (3)

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

2002 (1)

2001 (1)

2000 (2)

M. Gruber, J. Jahns, and S. Sinzinger, "Planar-integrated optical vector-matrix multiplier," Appl. Opt. 39, 5367-5373 (2000).
[CrossRef]

D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000).
[CrossRef]

1999 (1)

1994 (1)

1992 (1)

S. J. Walker and J. Jahns, "Optical clock distribution using integrated free-space optics," Opt. Commun. 90, 359-371 (1992).
[CrossRef]

1991 (1)

A. W. Lohmann, "Image formation of dilute arrays for optical information processing," Opt. Commun. 86, 365-370 (1991).
[CrossRef]

1989 (1)

1982 (1)

1969 (1)

S. E. Miller, "Integrated optics: an introduction," Bell Syst. Tech. J. 48, 2059-2068 (1969).

Albrecht, H.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Ayliffe, M. H.

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

Banno, J.

Barbieri, R.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Bathel, R.

R. Bathel, S. Sinzinger, and J. Jahns, "Ray-tracing analysis of planar optical systems," in OSA Topical Meeting on Diffractive Optics and Microoptics (Optical Society of America, 2000), pp. 145-146.

Bauer, J.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Baukens, V.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Beier, A.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Beil, P.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Benabes, P.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Berger, C.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Beyeler, R.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Bierhoff, T.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Brenner, K.-H.

Brunfaut, M.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Carrera, R. Barbieri

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

Casswell, J. J.

J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).

Chateauneuf, M.

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

Combsc, D.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Dangel, R.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Daria, V. R.

V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
[CrossRef]

Debaes, C.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Dellmann, L.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Demmer, P.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Ebling, F.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Eckert, W.

Esener, S. C.

Fainman, Y.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Ford, J. E.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Franke, M.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Gauthier, A.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Glückstad, J.

V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
[CrossRef]

Griese, E.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Gruber, M.

M. Gruber, D. Hagedorn, and W. Eckert, "Precise and simple optical alignment method for double-sided lithography," Appl. Opt. 40, 5052-5055 (2001).
[CrossRef]

M. Gruber, J. Jahns, and S. Sinzinger, "Planar-integrated optical vector-matrix multiplier," Appl. Opt. 39, 5367-5373 (2000).
[CrossRef]

M. Gruber, R. Kerssenfischer, and J. Jahns, "Cascadable fan-out module for parallel optical short-haul interconnects," in Proceedings of the OSA Topical Meeting on Optics in Computing 2003 (Optical Society of America, 2003).

R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

Hagedorn, D.

Hasegawa, M.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Heming, R.

R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

Hermanne, A.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Horst, F.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Huang, A.

J. Jahns and A. Huang, "Planar integration of free-space optical components," Appl. Opt. 28, 1602-1605 (1989).
[CrossRef] [PubMed]

A. Huang and J. Jahns, "Mask controlled coupling of inter-substrate optical components," U.S. patent 4,966,446 (30 October 1990).

Huang, D.

Iga, K.

Jahns, J.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

M. Gruber, J. Jahns, and S. Sinzinger, "Planar-integrated optical vector-matrix multiplier," Appl. Opt. 39, 5367-5373 (2000).
[CrossRef]

S. J. Walker and J. Jahns, "Optical clock distribution using integrated free-space optics," Opt. Commun. 90, 359-371 (1992).
[CrossRef]

J. Jahns and A. Huang, "Planar integration of free-space optical components," Appl. Opt. 28, 1602-1605 (1989).
[CrossRef] [PubMed]

R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

M. Gruber, R. Kerssenfischer, and J. Jahns, "Cascadable fan-out module for parallel optical short-haul interconnects," in Proceedings of the OSA Topical Meeting on Optics in Computing 2003 (Optical Society of America, 2003).

R. Bathel, S. Sinzinger, and J. Jahns, "Ray-tracing analysis of planar optical systems," in OSA Topical Meeting on Diffractive Optics and Microoptics (Optical Society of America, 2000), pp. 145-146.

M. Jarczynski and J. Jahns, "Planar free-space optical interface module based on a hybrid imaging system," in EOS Topical Meeting, Optics in Computing 2003 (European Optical Society, 2004), pp. 21-23.

M. Jarczynski and J. Jahns, "Planar-integrated free-space optics for optical interconnects and fan-out/in operations," in Photonic Devices and Algorithms for Computing VI, K. M. Iftekharuddin and A. A. S. Awwal, eds., Proc. SPIE 5556,15-26 (2004).

A. Huang and J. Jahns, "Mask controlled coupling of inter-substrate optical components," U.S. patent 4,966,446 (30 October 1990).

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

S. Sinzinger and J. Jahns, Microoptics (Wiley-VCH, 1999), Chap. 7.2.

Jarczynski, M.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

M. Jarczynski and J. Jahns, "Planar-integrated free-space optics for optical interconnects and fan-out/in operations," in Photonic Devices and Algorithms for Computing VI, K. M. Iftekharuddin and A. A. S. Awwal, eds., Proc. SPIE 5556,15-26 (2004).

M. Jarczynski and J. Jahns, "Planar free-space optical interface module based on a hybrid imaging system," in EOS Topical Meeting, Optics in Computing 2003 (European Optical Society, 2004), pp. 21-23.

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).

Kerssenfischer, R.

M. Gruber, R. Kerssenfischer, and J. Jahns, "Cascadable fan-out module for parallel optical short-haul interconnects," in Proceedings of the OSA Topical Meeting on Optics in Computing 2003 (Optical Society of America, 2003).

Kim, H.-C.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Kirk, A. G.

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

Kley, E.

R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

Klug, R.

Kokubun, Y.

Kostelnik, J.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Kumpatla, S.

J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).

Lacroix, F.

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

Lamprecht, T.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Levy, U.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Li, G.

Liu, Y.

Lohmann, A. W.

A. W. Lohmann, "Image formation of dilute arrays for optical information processing," Opt. Commun. 86, 365-370 (1991).
[CrossRef]

Lukowicz, P.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

Maderc, J.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Marchand, P. J.

Meeus, W.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Miller, D. A. B.

D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000).
[CrossRef]

Miller, S. E.

S. E. Miller, "Integrated optics: an introduction," Bell Syst. Tech. J. 48, 2059-2068 (1969).

Misawa, S.

Mödinger, R.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Morf, T.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Morrison, R. L.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Numata, H.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Offrein, B. J.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Ogawa, H.

Oikawa, M.

Ottevaere, H.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Ozguz, V. H.

Pfeiffer, K.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Plant, D. V.

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

Rodrigo, P. J.

V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
[CrossRef]

Russell, G. A.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Rutkowski, J.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Schrage, J.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Schröder, H.

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

Shiono, T.

Sinzinger, S.

V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
[CrossRef]

M. Gruber, J. Jahns, and S. Sinzinger, "Planar-integrated optical vector-matrix multiplier," Appl. Opt. 39, 5367-5373 (2000).
[CrossRef]

S. Sinzinger and J. Jahns, Microoptics (Wiley-VCH, 1999), Chap. 7.2.

R. Bathel, S. Sinzinger, and J. Jahns, "Ray-tracing analysis of planar optical systems," in OSA Topical Meeting on Diffractive Optics and Microoptics (Optical Society of America, 2000), pp. 145-146.

Snowdon, J. F.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).

Stacko, R. A.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Süllau, W.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Taira, Y.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Tamayo, I.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Thienpont, H.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Tremblay, E. J.

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

Troester, G.

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

Tröster, G.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

Tuteleers, P.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Van Campenhout, J.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Vervaeke, M.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Volckaerts, B.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Vynck, P.

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

Walker, S. J.

S. J. Walker and J. Jahns, "Optical clock distribution using integrated free-space optics," Opt. Commun. 90, 359-371 (1992).
[CrossRef]

Wirz, M.

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).

Wittig, L.

R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

Yamada, F.

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

Yuceturk, E.

Appl. Opt. (7)

Bell Syst. Tech. J. (1)

S. E. Miller, "Integrated optics: an introduction," Bell Syst. Tech. J. 48, 2059-2068 (1969).

IEEE J. Sel. Top. Quantum Electron. (1)

C. Debaes, M. Vervaeke, V. Baukens, H. Ottevaere, P. Vynck, P. Tuteleers, B. Volckaerts, W. Meeus, M. Brunfaut, J. Van Campenhout, A. Hermanne, and H. Thienpont, "Low-cost micro-optical modules for MCM level optical intersconnections," IEEE J. Sel. Top. Quantum Electron. 9, 518-530 (2003).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

P. Lukowicz, J. Jahns, R. Barbieri, P. Benabes, T. Bierhoff, A. Gauthier, M. Jarczynski, G. A. Russell, J. Schrage, W. Süllau, J. F. Snowdon, M. Wirz, and G. Tröster, "Optoelectronic interconnection technology in the HOLMS system," IEEE J. Sel. Top. Quantum Electron. 9, 624-635 (2003).
[CrossRef]

A. G. Kirk, D. V. Plant, M. H. Ayliffe, M. Chateauneuf, and F. Lacroix, "Design rules for highly parallel free-space optical interconnects," IEEE J. Sel. Top. Quantum Electron. 9, 531-547 (2003).
[CrossRef]

Opt. Commun. (2)

S. J. Walker and J. Jahns, "Optical clock distribution using integrated free-space optics," Opt. Commun. 90, 359-371 (1992).
[CrossRef]

A. W. Lohmann, "Image formation of dilute arrays for optical information processing," Opt. Commun. 86, 365-370 (1991).
[CrossRef]

Opt. Eng. (1)

V. R. Daria, P. J. Rodrigo, S. Sinzinger, and J. Glückstad, "Phase-only optical decryption in a planar integrated micro-optics system," Opt. Eng. 43, 2223-2227 (2004).
[CrossRef]

Proc. IEEE (1)

D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000).
[CrossRef]

Other (12)

C. Berger, R. Beyeler, R. Dangel, L. Dellmann, F. Horst, T. Lamprecht, T. Morf, B. J. Offrein, F. Yamada, M. Hasegawa, H. Numata, and Y. Taira, "Optical interconnect demonstrator with embedded waveguides and butt-coupled optoelectronic modules," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD II (Optical Society of America, 2005).

H. Albrecht, A. Beier, P. Demmer, M. Franke, R. Mödinger, K. Pfeiffer, P. Beil, J. Kostelnik, J. Bauer, F. Ebling, H. Schröder, and E. Griese, "New-generation interconnect," in Proceedings of the OSA Topical Meeting on Information Photonics, IWD I (Optical Society of America, 2005).

E. J. Tremblay, J. Rutkowski, I. Tamayo, R. A. Stacko, R. L. Morrison, D. Combsc, J. Maderc, H.-C. Kim, U. Levy, Y. Fainman, and J. E. Ford, "Ultra-thin folded imager," in Proceedings of the OSA Topical Meeting on Computational Optical Sensing and Imaging (Optical Society of America, 2005).

S. Sinzinger and J. Jahns, Microoptics (Wiley-VCH, 1999), Chap. 7.2.

J. J. Casswell, S. Kumpatla, J. F. Snowdon, M. Jarczynski, and M. Wirz, "Board integrated micro-optics for divergence management in opto-electronic interconnect systems," in Proceedings of the OSA Topical Meeting on Information Photonics (Optical Society of America, 2005).

R. Bathel, S. Sinzinger, and J. Jahns, "Ray-tracing analysis of planar optical systems," in OSA Topical Meeting on Diffractive Optics and Microoptics (Optical Society of America, 2000), pp. 145-146.

M. Jarczynski and J. Jahns, "Planar free-space optical interface module based on a hybrid imaging system," in EOS Topical Meeting, Optics in Computing 2003 (European Optical Society, 2004), pp. 21-23.

M. Jarczynski and J. Jahns, "Planar-integrated free-space optics for optical interconnects and fan-out/in operations," in Photonic Devices and Algorithms for Computing VI, K. M. Iftekharuddin and A. A. S. Awwal, eds., Proc. SPIE 5556,15-26 (2004).

M. Gruber, R. Kerssenfischer, and J. Jahns, "Cascadable fan-out module for parallel optical short-haul interconnects," in Proceedings of the OSA Topical Meeting on Optics in Computing 2003 (Optical Society of America, 2003).

R. Heming, J. Jahns, M. Gruber, L. Wittig, and E. Kley, "Combination of binary and analog lithography to fabricate efficient planar-integrated free-space optical interconnects," in Proceedings of the Deutische Gesellschaft für angewandte optic, Wroclaw, Poland (German optical Society, 2005), Vol. 106.

A. Huang and J. Jahns, "Mask controlled coupling of inter-substrate optical components," U.S. patent 4,966,446 (30 October 1990).

M. Wirz, R. Barbieri Carrera, P. Lukowicz, G. Troester, M. Jarczynski, and J. Jahns, "Combining optical and electrical design constraints in the HOLMS opto-electronic MCM components," in Proceedings of the OSA Topical Meeting on Optics in Computing (Optical Society of America, 2003).

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Figures (8)

Fig. 1
Fig. 1

Schematic to point up the merging of stacked planar and planar-integrated FSO. Stacked planar optics is based on an assembly of stacked substrates with optical components integrated on their surfaces (top part). In planar-integrated FSO, the optical path is folded inside a substrate (center part). This leads to a maximized degree of integration and a minimized packaging effort. A 3D free-space optical multilayer results from a combination of both concepts (bottom part). Herewith, an optimized relationship between design freedom and monolithic integration can be achieved.

Fig. 2
Fig. 2

(Color online) Schematics to demonstrate tasks and implementation of a 3D optical interface module in a processor-memory-bus interconnect. (a) Three-dimensional visualization of the PIFSO module packaged with MCM MT-housed fiber bundles, and PCB-embedded waveguides. (b) xz cross sections showing the specification of the free-space interconnect. (c) One part of several similar optical interconnects to explain the arrangement of optical elements. Keys A, B, optical subsystems; LD, laser diode; MT, multitermination; PCB, printed circuit board.

Fig. 3
Fig. 3

(Color online) Assembled 3D optical multilayer module. Four planar-cemented substrates of 3 mm thickness are shown. The complete stack is saved by protective substrates (0.5 mm thick). Surfaces with functionality are labeled with slf, slr, etc. The finished module is an interface for 192 optical channels. The OE MCM will be fixed on the visible top side.

Fig. 4
Fig. 4

(Color online) (a) Experimental setup to test the 3D optical multilayer by use of MT-housed fiber bundles and MIPs. The photographs in (b) and (c) show the front MIP with four fiber bundles and aligned to the 3D optical multilayer, respectively. Key: A, 3D optical multilayer module; B, chuck for module; C, MIPs; D, gimbal mount for MIP alignment; E, CCD cameras; F, fiber bundles; G, laser transmitter with ST pigtail; H, sensors of powermeter with FC∕PC pigtail.

Fig. 5
Fig. 5

First experimental results for the hybrid imaging system (subsystem A).

Fig. 6
Fig. 6

(Color online) Incoupling and outcoupling sections of the multichannel optics (subsystem B). Pairs of active channels are visible in the photographs on the right-hand side.

Fig. 7
Fig. 7

Incoupling and outcoupling sections of the hybrid imaging optics (subsystem A). Pairs of active channels are visible in the photographs on the right-hand side.

Fig. 8
Fig. 8

(Color online) (a) Laboratory setup to check the optical interconnection between PIFSO prototype and PCB-embedded waveguides. (b) PIFSO prototype with alignment structures inserted into the OE-PCB. (c) Picture of the OE-PCB abutting surface with one active channel. The light signal was transferred via the PIFSO prototype and the waveguides.

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