Abstract

We have developed plasma chemical vaporization machining by using a microelectrode for the fabrication of small complex-shaped optical surfaces. In this method, a 0.5  mm diameter pipe microelectrode, from which processing gas is drawn in, generates a small localized plasma that is scanned over a workpiece under numerical computer control to shape a desired surface. A 12   mm×12   mm nonaxisymmetric mirror with a maximum depth of approximately 3   μm was successfully fabricated with a peak-to-valley shape accuracy of 0 .04   μm in an area excluding the edges of the mirror. The average surface roughness was 0 .58   nm, which is smooth enough for optical use.

© 2006 Optical Society of America

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