Abstract

Reflectance versus incidence angle measurements have been performed from 5  to  152  nm on samples of SiC with a different C∕Si ratio deposited with rf magnetron sputtering. The optical constants of the material at different wavelengths have been determined by using a curve-fitting technique of reflectance values versus incidence angle. Complementary measurements of the incident beam polarization, film thickness, surface roughness, and stoichiometry were performed to complete the analysis of the samples.

© 2006 Optical Society of America

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    [CrossRef] [PubMed]

2006 (1)

2005 (1)

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

2004 (3)

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, "Experimental comparison of extreme-ultraviolet multilayers for solar physics," Appl. Opt. 43, 1835-1848 (2004).
[CrossRef] [PubMed]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

L. Pasquali, A. De Luisa, and S. Nannarone, "The UHV experimental chamber for optical measurements (reflectivity and absorption) and angle resolved photoemission of the BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 1142-1145 (2004).
[CrossRef]

2002 (1)

2000 (2)

1998 (1)

1997 (2)

R. A. M. Keski-Kuha, C. M. Fleetwood, and J. Robichaud, "Performance of high-density cast silicon carbide in the extreme ultraviolet," Appl. Opt. 36, 4409-4410 (1997).
[CrossRef] [PubMed]

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

1996 (1)

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

1995 (1)

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

1991 (1)

1989 (1)

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

1988 (3)

1977 (1)

Arendt, P.

Batori, V.

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

Blumenstock, G. M.

Bonanno, G.

G. Bonanno, G. Naletto, and G. Tondello, "A test facility to calibrate EUV detectors," in Proceedings of the ESA Symposium on Photon Detectors for Space Instrumentations, ESA SP-356, (1992), pp. 233-236.

Borgatti, F.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Brandt, G. B.

Cao, J.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Cash, W. C.

Choyke, W. J.

Curdt, W.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

De Luisa, A.

L. Pasquali, A. De Luisa, and S. Nannarone, "The UHV experimental chamber for optical measurements (reflectivity and absorption) and angle resolved photoemission of the BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 1142-1145 (2004).
[CrossRef]

DeLuisa, A.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Donguy, S.

Doyle, B. P.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Ehrhardt, H.

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

Finetti, P.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Fisher, R. F.

Fleetwood, C. M.

Frassetto, F.

Friedman, S. D.

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Gabriel, A.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Garoli, D.

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

Gazzadi, G. C.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Giglia, A.

M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006).
[CrossRef] [PubMed]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Goela, J. S.

Green, J. C.

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Grewing, M.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Hassler, D.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Huber, M. C. E.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Iijima, A.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Jordan, S. D.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Keski-Kuha, R. A. M.

Kjornrattanawanich, B.

Koide, T.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Kortright, J. B.

Kuhne, M.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Larruquert, J. I.

Lemaire, P.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Lompado, A.

Mahne, N.

M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006).
[CrossRef] [PubMed]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Marsch, E.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Moos, H. W.

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Murray, B. W.

Naletto, G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

G. Bonanno, G. Naletto, and G. Tondello, "A test facility to calibrate EUV detectors," in Proceedings of the ESA Symposium on Photon Detectors for Space Instrumentations, ESA SP-356, (1992), pp. 233-236.

Namioka, T.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Nannarone, S.

M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006).
[CrossRef] [PubMed]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

L. Pasquali, A. De Luisa, and S. Nannarone, "The UHV experimental chamber for optical measurements (reflectivity and absorption) and angle resolved photoemission of the BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 1142-1145 (2004).
[CrossRef]

Newnam, B.

Nicolosi, P.

M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006).
[CrossRef] [PubMed]

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

Oegerle, W. R.

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Osantowski, J.

Partlow, W. D.

Pasquali, L.

L. Pasquali, A. De Luisa, and S. Nannarone, "The UHV experimental chamber for optical measurements (reflectivity and absorption) and angle resolved photoemission of the BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 1142-1145 (2004).
[CrossRef]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Patelli, A.

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

Pedio, M.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Pelizzo, M. G.

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Pelizzo, M.-G.

Pickering, M. A.

Pinneo, J. M.

Poland, A. I.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Rigato, F.

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

Rigato, V.

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

Robichaud, J.

Sahnow, D. J.

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Sato, S.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Scheib, M.

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

Schmit, D. R.

Schuhle, U.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Schwan, J.

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

Scott, M.

Seely, J.

Selvaggi, G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

Siegmund, O. H.

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Siegmund, O. H. W.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Supertzi, E. P.

Swartzlander, A. B.

Takacs, P. Z.

Takeda, S.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Taylor, R. L.

Theel, T.

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

Thomas, R. J.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Timothy, J. G.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Toft, A. R.

Tondello, G.

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

G. Bonanno, G. Naletto, and G. Tondello, "A test facility to calibrate EUV detectors," in Proceedings of the ESA Symposium on Photon Detectors for Space Instrumentations, ESA SP-356, (1992), pp. 233-236.

Ulrich, S.

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

Venskytis, F. J.

Vial, J.-C.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Wilhelm, K.

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Windt, D. L.

Yamamoto, M.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Yanagihara, M.

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

AIP Conf. Proc. (2)

S. Nannarone, F. Borgatti, A. DeLuisa, B. P. Doyle, G. C. Gazzadi, A. Giglia, P. Finetti, N. Mahne, L. Pasquali, M. Pedio, G. Selvaggi, G. Naletto, M. G. Pelizzo, and G. Tondello, "The BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 450-453 (2004).
[CrossRef]

L. Pasquali, A. De Luisa, and S. Nannarone, "The UHV experimental chamber for optical measurements (reflectivity and absorption) and angle resolved photoemission of the BEAR beamline at ELETTRA," AIP Conf. Proc. 705, 1142-1145 (2004).
[CrossRef]

Appl. Opt. (12)

W. J. Choyke, W. D. Partlow, E. P. Supertzi, F. J. Venskytis, and G. B. Brandt, "Silicon-carbide diffraction grating for the vacuum ultraviolet: feasibility," Appl. Opt. 16, 2013-2014 (1977).
[CrossRef] [PubMed]

D. L. Windt, W. C. Cash, Jr., M. Scott, P. Arendt, B. Newnam, R. F. Fisher, A. B. Swartzlander, P. Z. Takacs, and J. M. Pinneo, "Optical constants for thin films of C, diamond, Al, Si, and CVD SiC from 24 A to 1216 A," Appl. Opt. 27, 279-295 (1988).
[CrossRef] [PubMed]

R. A. M. Keski-Kuha, J. Osantowski, A. R. Toft, and W. D. Partlow, "Grazing incidence reflectance of SiC films produced by plasma-assisted chemical vapor deposition," Appl. Opt. 27, 1499-1502 (1988).
[CrossRef] [PubMed]

J. B. Kortright and D. L. Windt, "Amorphous silicon carbide coatings for EUV optics," Appl. Opt. 27, 2841-2846 (1988).
[CrossRef] [PubMed]

J. S. Goela, M. A. Pickering, R. L. Taylor, B. W. Murray, and A. Lompado, "Properties of chemical vapor deposited SiC for optics applications in severe environments," Appl. Opt. 30, 3166-3175 (1991).
[CrossRef] [PubMed]

R. A. M. Keski-Kuha, C. M. Fleetwood, and J. Robichaud, "Performance of high-density cast silicon carbide in the extreme ultraviolet," Appl. Opt. 36, 4409-4410 (1997).
[CrossRef] [PubMed]

R. A. M. Keski-Kuha, G. M. Blumenstock, C. M. Fleetwood, and D. R. Schmit, "Effects of space exposure on ion-beam-deposited silicon-carbide and boron-carbide coatings," Appl. Opt. 37, 8038-8042 (1998).
[CrossRef]

J. I. Larruquert and R. A. M. Keski-Kuha, "Optical properties of hot-pressed B4C in the extreme ultraviolet," Appl. Opt. 39, 1537-1540 (2000).
[CrossRef]

J. I. Larruquert and R. A. M. Keski-Kuha, "Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and of evaporated Cr," Appl. Opt. 39, 2772-2781 (2000).
[CrossRef]

J. I. Larruquert and R. A. M. Keski-Kuha, "Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet," Appl. Opt. 41, 5398-5404 (2002).
[CrossRef] [PubMed]

D. L. Windt, S. Donguy, J. Seely, and B. Kjornrattanawanich, "Experimental comparison of extreme-ultraviolet multilayers for solar physics," Appl. Opt. 43, 1835-1848 (2004).
[CrossRef] [PubMed]

M.-G. Pelizzo, F. Frassetto, P. Nicolosi, A. Giglia, N. Mahne, and S. Nannarone, "Polarization and higher-order content measurement of a soft-x-ray monochromatized beam with Mo-Si multilayers," Appl. Opt. 45, 1985-1992 (2006).
[CrossRef] [PubMed]

Diamond Relat. Mater. (1)

S. Ulrich, T. Theel, J. Schwan, V. Batori, M. Scheib, and H. Ehrhardt, "Low-temperature formation of β-silicon carbide," Diamond Relat. Mater. 6, 645-648 (1997).
[CrossRef]

J. Electron Spectrosc. Relat. Phenom. (1)

P. Nicolosi, D. Garoli, M. G. Pelizzo, V. Rigato, A. Patelli, and F. Rigato, "VUV reflectance measurements and optical constants of SiC thin films," J. Electron Spectrosc. Relat. Phenom. 144-147, 987-992 (2005).
[CrossRef]

Proc. SPIE (1)

D. J. Sahnow, S. D. Friedman, W. R. Oegerle, H. W. Moos, J. C. Green, and O. H. Siegmund, "Design and predicted performance of the Far Ultraviolet Spectroscopic Explorer," in Space Telescopes and Instruments IV, P. Y. Bely and J. B. Breckinridge, eds., Proc. SPIE 2807, 2-10 (1996).
[CrossRef]

Rev. Sci. Instrum. (1)

M. Yanagihara, J. Cao, M. Yamamoto, T. Namioka, S. Sato, T. Koide, S. Takeda, and A. Iijima, "Optical constants of SiC mirrors produced by different methods for photons of 60-1000 eV," Rev. Sci. Instrum. 60, 2030-2033 (1989).
[CrossRef]

Sol. Phys. (1)

K. Wilhelm, W. Curdt, E. Marsch, U. Schuhle, A. Gabriel, P. Lemaire, J.-C. Vial, M. Grewing, D. Hassler, M. C. E. Huber, S. D. Jordan, A. I. Poland, R. J. Thomas, M. Kuhne, J. G. Timothy, and O. H. W. Siegmund, "SUMER-Solar ultraviolet measurements of emitted radiation," Sol. Phys. 162, 189-231 (1995).
[CrossRef]

Other (4)

A.M.Khounsary, U.Dinger, and K.Ota, eds., Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, Proc. SPIE 5193 (2003).

S.Fineschi, B.E.Wooodgate, and R.A.Kimble, eds. Ultraviolet and X-Ray Detection, Spectroscopy and Polarimetry III, Proc. SPIE 3764 (1999).

G. Bonanno, G. Naletto, and G. Tondello, "A test facility to calibrate EUV detectors," in Proceedings of the ESA Symposium on Photon Detectors for Space Instrumentations, ESA SP-356, (1992), pp. 233-236.

Elettra Website: http://www.elettra.trieste.it.

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Figures (8)

Fig. 1
Fig. 1

Polarization of the measure chamber at the Luxor laboratory.

Fig. 2
Fig. 2

Reflectance measurements at 58.4 nm for sample SiC019.

Fig. 3
Fig. 3

Reflectance measurements at 17 nm for sample SiC015.

Fig. 4
Fig. 4

Best-fit result for sample SiC014 at 121.6 nm.

Fig. 5
Fig. 5

Real part of the index of refraction for the three samples measured in the 5–152 nm spectral range.

Fig. 6
Fig. 6

Imaginary part of the index of refraction for the three samples measured in the 5–152 nm spectral range.

Fig. 7
Fig. 7

Comparison between Kortright dc magnetron sputtering SiC (Ref. 8) optical constants and our rf magnetron sputtering SiC. The solid curves have no physical meaning and are shown only to help the reader.

Fig. 8
Fig. 8

Optical constants versus C∕Si ratio. The data were reported in this way to avoid overlapping. The dashed curves between the points are shown to help the reader. The real part of the index of refraction versus the C∕Si ratio at (a) 46.1, 74.4, 132, and 152 nm and at (b) 58.4, 91.9, 104.8, 121.6, and 142 nm. The imaginary part of the index of refraction versus the C∕Si ratio at (c) 46.1, 58.4, 74.4, 91.9, 121.6, and 152 nm and at (d) 104.8, 132, and 142 nm.

Tables (2)

Tables Icon

Table 1 Samples Tested

Tables Icon

Table 2 Optical Constants for Magnetron Sputtering SiC

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

S = i = 1 N | R m i R f ( ϑ i , n , k , f ) | 2 σ i     2 ,
( r * ) 01         s , p = r 01         s , p exp [ 2 ( 2 π σ cos ϑ λ ) 2 ] .
I = I s cos 2 ϕ + I p sin 2 ϕ ,
f = I s I p I s + I p .
R = 1 + f 2 R p + 1 f 2 R s ,

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