Abstract

Cavities have been laser ablated in the ends of single-mode optical fibers and sealed by aluminized polycarbonate diaphragms to produce Fabry–Perot pressure sensors. Both conventional fibers and novel, multicore fibers were used, demonstrating the possibility of producing compact arrays of sensors and multiple sensors on an individual fiber 125 μm in diameter. This high spatial resolution can be combined with high temporal resolution by simultaneously interrogating the sensors by using separate laser sources at three wavelengths. Shock tube tests showed a sensor response time of 3 μs to a step increase in pressure.

© 2006 Optical Society of America

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  1. C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
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    [CrossRef]
  3. J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
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  5. M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
    [CrossRef]
  6. D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
    [CrossRef]
  7. D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
    [CrossRef]
  8. K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005).
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    [CrossRef] [PubMed]
  10. P. C. Beard and T. N. Mills, "Miniature optical fiber ultrasonic hydrophone using a Fabry-Perot polymer film interferometer," Electron. Lett. 33, 801-803 (1997).
    [CrossRef]
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  12. J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
    [CrossRef]
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    [CrossRef]
  14. G. M. H. Flockhart, W. N. MacPherson, J. S. Barton, J. D. C. Jones, L. Zhang, and I. Bennion, "Two-axis bend measurement with Bragg gratings in multicore optical fiber," Opt. Lett. 28, 387-389 (2003).
    [CrossRef] [PubMed]
  15. W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
    [CrossRef]
  16. M. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Dekker, 1992).

2005 (2)

K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005).
[CrossRef]

E. Cibula and D. Ðonlagić, "Miniature fiber-optic pressure sensor with a polymer diaphragm," Appl. Opt. 44, 2736-2744 (2005).
[CrossRef] [PubMed]

2003 (3)

2002 (2)

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
[CrossRef]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

2001 (2)

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
[CrossRef]

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

2000 (1)

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

1999 (1)

W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
[CrossRef]

1998 (1)

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A 66, 150-154 (1998).
[CrossRef]

1997 (3)

C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
[CrossRef]

P. C. Beard and T. N. Mills, "Miniature optical fiber ultrasonic hydrophone using a Fabry-Perot polymer film interferometer," Electron. Lett. 33, 801-803 (1997).
[CrossRef]

W. N. MacPherson, S. R. Kidd, J. S. Barton, and J. D. C. Jones, "Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps," IEE Proc. Optoelectron. 144, 130-133 (1997).
[CrossRef]

Abeysinghe, D. C.

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
[CrossRef]

Anderson, S. J.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

Barton, J. S.

G. M. H. Flockhart, W. N. MacPherson, J. S. Barton, J. D. C. Jones, L. Zhang, and I. Bennion, "Two-axis bend measurement with Bragg gratings in multicore optical fiber," Opt. Lett. 28, 387-389 (2003).
[CrossRef] [PubMed]

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
[CrossRef]

W. N. MacPherson, S. R. Kidd, J. S. Barton, and J. D. C. Jones, "Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps," IEE Proc. Optoelectron. 144, 130-133 (1997).
[CrossRef]

Bauer, H. D.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Beard, P. C.

P. C. Beard and T. N. Mills, "Miniature optical fiber ultrasonic hydrophone using a Fabry-Perot polymer film interferometer," Electron. Lett. 33, 801-803 (1997).
[CrossRef]

Bennion, I.

Bing, Y.

Boyd, J. T.

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
[CrossRef]

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
[CrossRef]

Braune, T.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Buttsworth, D. R.

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

Chana, K. S.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

Cibula, E.

Dasgupta, S.

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
[CrossRef]

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
[CrossRef]

Deng, J.

ÐonlagiC, D.

Ehrfeld, W.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Esashi, M.

K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005).
[CrossRef]

Flockhart, G. M. H.

Gander, M. J.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

Gaudron, A.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Giovanni, M.

M. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Dekker, 1992).

Haase, J.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Haga, Y.

K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005).
[CrossRef]

Hok, B.

C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
[CrossRef]

Itoh, H.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A 66, 150-154 (1998).
[CrossRef]

Jackson, H. E.

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
[CrossRef]

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
[CrossRef]

Jones, J. D. C.

G. M. H. Flockhart, W. N. MacPherson, J. S. Barton, J. D. C. Jones, L. Zhang, and I. Bennion, "Two-axis bend measurement with Bragg gratings in multicore optical fiber," Opt. Lett. 28, 387-389 (2003).
[CrossRef] [PubMed]

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
[CrossRef]

W. N. MacPherson, S. R. Kidd, J. S. Barton, and J. D. C. Jones, "Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps," IEE Proc. Optoelectron. 144, 130-133 (1997).
[CrossRef]

Jones, T. V.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

Kidd, S. R.

W. N. MacPherson, S. R. Kidd, J. S. Barton, and J. D. C. Jones, "Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps," IEE Proc. Optoelectron. 144, 130-133 (1997).
[CrossRef]

Kilpatrick, J. M.

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
[CrossRef]

Kim, D. W.

Klotzbuecher, T.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Kobayashi, H.

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

Kohashi, M.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A 66, 150-154 (1998).
[CrossRef]

MacPherson, W. N.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

G. M. H. Flockhart, W. N. MacPherson, J. S. Barton, J. D. C. Jones, L. Zhang, and I. Bennion, "Two-axis bend measurement with Bragg gratings in multicore optical fiber," Opt. Lett. 28, 387-389 (2003).
[CrossRef] [PubMed]

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
[CrossRef]

W. N. MacPherson, S. R. Kidd, J. S. Barton, and J. D. C. Jones, "Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps," IEE Proc. Optoelectron. 144, 130-133 (1997).
[CrossRef]

Mills, T. N.

P. C. Beard and T. N. Mills, "Miniature optical fiber ultrasonic hydrophone using a Fabry-Perot polymer film interferometer," Electron. Lett. 33, 801-803 (1997).
[CrossRef]

Paatzsch, T.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Popp., M.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Reuben, R. L.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

Smaglinski, I.

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Smith, L.

C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
[CrossRef]

Stevens, R.

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

Strandman, C.

C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
[CrossRef]

Sugihara, M.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A 66, 150-154 (1998).
[CrossRef]

Tenerz, L.

C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
[CrossRef]

Tohyama, O.

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A 66, 150-154 (1998).
[CrossRef]

Totsu, K.

K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005).
[CrossRef]

Wang, A.

Wolff, J. M.

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

Xiao, H.

Zhang, L.

Zhou, J.

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

Appl. Opt. (2)

Electron. Lett. (1)

P. C. Beard and T. N. Mills, "Miniature optical fiber ultrasonic hydrophone using a Fabry-Perot polymer film interferometer," Electron. Lett. 33, 801-803 (1997).
[CrossRef]

IEE Proc. Optoelectron. (1)

W. N. MacPherson, S. R. Kidd, J. S. Barton, and J. D. C. Jones, "Phase demodulation in optical fibre Fabry-Perot sensors with inexact phase steps," IEE Proc. Optoelectron. 144, 130-133 (1997).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

D. C. Abeysinghe, S. Dasgupta, J. T. Boyd, and H. E. Jackson, "A Novel MEMS pressure sensor fabricated on an optical fiber," IEEE Photon. Technol. Lett. 13, 993-995 (2001).
[CrossRef]

IEEE Sens. J. (1)

M. J. Gander, W. N. MacPherson, J. S. Barton, R. L. Reuben, J. D. C. Jones, R. Stevens, K. S. Chana, S. J. Anderson, and T. V. Jones, "Embedded micromachined fiber-optic Fabry-Perot pressure sensors in aerodynamics applications," IEEE Sens. J. 3, 102-107 (2003).
[CrossRef]

J. Micromech. Microeng. (2)

D. C. Abeysinghe, S. Dasgupta, H. E. Jackson, and J. T. Boyd, "Novel MEMS pressure and temperature sensors fabricated on optical fibers," J. Micromech. Microeng. 12, 229-235 (2002).
[CrossRef]

K. Totsu, Y. Haga, and M. Esashi, "Ultra-miniature fiber-optic pressure sensor using white light interferometry," J. Micromech. Microeng. 15, 71-75 (2005).
[CrossRef]

Meas. Sci. Technol. (1)

J. M. Kilpatrick, W. N. MacPherson, J. S. Barton, J. D. C. Jones, D. R. Buttsworth, T. V. Jones, K. S. Chana, and S. J. Anderson, "Measurement of unsteady gas temperature with optical fiber Fabry-Perot microsensors," Meas. Sci. Technol. 13, 706-712 (2002).
[CrossRef]

Opt. Eng. (1)

J. Zhou, S. Dasgupta, H. Kobayashi, J. M. Wolff, H. E. Jackson, and J. T. Boyd, "Optically interrogated MEMS pressure sensors for propulsion applications," Opt. Eng. 40, 598-604 (2001).
[CrossRef]

Opt. Lett. (1)

Proc. SPIE (1)

T. Klotzbuecher, M. Popp.T. Braune, J. Haase, A. Gaudron, I. Smaglinski, T. Paatzsch, H. D. Bauer, and W. Ehrfeld, "Custom specific fabrication of integrated optical devices by excimer laser ablation of polymers," in Laser Applications in Microelectronic and Optoelectronic Applications V, H. Helvajian, K. Sugioka, M. C. Gower, and J. J. Dubowski, eds. Proc. SPIE 3933, 290-299 (2000).
[CrossRef]

Rev. Sci. Instrum. (1)

W. N. MacPherson, J. M. Kilpatrick, J. S. Barton, and J. D. C. Jones, "Miniature fiber optic pressure sensor for turbomachinery applications," Rev. Sci. Instrum. 70, 1868-1874 (1999).
[CrossRef]

Sens. Actuators (2)

C. Strandman, L. Smith, L. Tenerz, and B. Hok, "A production process of silicon sensor elements for a fiber-optic pressure sensor," Sens. Actuators A 63, 69-74 (1997).
[CrossRef]

O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators A 66, 150-154 (1998).
[CrossRef]

Other (1)

M. Giovanni, Flat and Corrugated Diaphragm Design Handbook (Dekker, 1992).

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Figures (14)

Fig. 1
Fig. 1

Schematic of fiber-optic Fabry-Perot pressure sensor.

Fig. 2
Fig. 2

Multicore fiber cross section showing the four cores illuminated (MCF provided by NASA).

Fig. 3
Fig. 3

70 μm diameter cavity ablated into the end of a single-core fiber.

Fig. 4
Fig. 4

Four cores ablated with 30 μm diameter cavities in France Telecom MCF.

Fig. 5
Fig. 5

Diaphragm attachment procedure.

Fig. 6
Fig. 6

Photograph of the side view of a single-core fiber sensor; the inset shows the top view.

Fig. 7
Fig. 7

Cavity transfer function for a SCF sensor. The dashed lines represent the three laser wavelengths.

Fig. 8
Fig. 8

Schematic of a sensor interrogation system.

Fig. 9
Fig. 9

Pressure cycling a reference electrical pressure sensor (top), a SCF sensor (middle), and the resulting pressure calibration curve for the optical sensor (bottom).

Fig. 10
Fig. 10

MCF pressure cycling experiment for a single interrogation wavelength.

Fig. 11
Fig. 11

Shock tube used to make dynamic pressure measurements.

Fig. 12
Fig. 12

Measurement of the differential pressure of a shock wave and the successive reflected shocks, recorded simultaneously by a SCF laser-machined sensor and a piezoresistive sensor.

Fig. 13
Fig. 13

Differential pressure of a shock front measured by an electrical (Kulite) sensor.

Fig. 14
Fig. 14

Differential pressure of a shock front measured by an optical (SCF) sensor.

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

d = λ 0     2 2 Δ λ ,
Δ ϕ Δ P = 4 π λ 3 ( 1 μ 2 ) a 4 16 E h 3 .
f 10.21 2 π a 2 D h ρ ,
D = E h 3 12 ( 1 μ 2 ) ,

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