Abstract

We developed a novel fabrication method of a reduced wavelength-dependent quarter-wave plate (QWP) based on form birefringence of a multilayered subwavelength structure. The multilayered structure was constructed by depositing a high-refractive-index thin film on a subwavelength-structured substrate with a low refractive index. The surface structure of the substrate was shallow enough to be formed by a mass replication technology. A high-refractive-index subwavelength grating was formed on ridges of the substrate by sputtering Zn2SnO4 (refractive index of 2.03 at a wavelength of 633  nm). Moreover, since the grooves of the high-refractive-index grating were very deep and narrow, the dispersion of form birefringence suppressed the dependency of phase retardance on the wavelength of light in a limited spectral region. The phase retardance of the fabricated QWP was 89° at a 633  nm wavelength and 79° at a 785  nm wavelength.

© 2006 Optical Society of America

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