Abstract

A prototype of a GaN-based stacked micro-optics system is demonstrated. The system consists of a GaN microlens, GaN membrane gratings, six spacers, a spatial filter, and a 980  nm VCSEL. The laser beam is collimated by the GaN microlens and diffracted by the GaN membrane grating. The systems can be used in blue–violet–UV micro-optics systems.

© 2006 Optical Society of America

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