Abstract

A dual-frequency laser interferometer has been developed based on a low-performance commercial interferometer. An optical resolution of 1.24  nm and a nanometer-scale accuracy have been achieved by using unique techniques to obtain an optical subdivision factor of 1/8. A method for reducing static positioning errors was also shown. The measurement of a free-falling body was performed to test the maximum achievable target velocity of the device. The experimental setup for measuring the static positioning errors was also given. The new interferometer could be widely used in nanometer-scale fabrications and measurements.

© 2006 Optical Society of America

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