Abstract

A dual-frequency laser interferometer has been developed based on a low-performance commercial interferometer. An optical resolution of 1.24  nm and a nanometer-scale accuracy have been achieved by using unique techniques to obtain an optical subdivision factor of 1/8. A method for reducing static positioning errors was also shown. The measurement of a free-falling body was performed to test the maximum achievable target velocity of the device. The experimental setup for measuring the static positioning errors was also given. The new interferometer could be widely used in nanometer-scale fabrications and measurements.

© 2006 Optical Society of America

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References

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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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2004 (3)

J. Lawall, "Interferometry for accurate displacement metrology," Opt. Photon. News 15, 40-46 (2004).
[CrossRef]

Z. F. Zhou, T. Zhang, W. Huang, L. D. Guo, and J. Huang, "Precision ranger for measuring large mechanical components," Appl. Opt. 45, 4816-4820 (2004).
[CrossRef]

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

2003 (1)

2002 (1)

1999 (1)

Y. M. Han, Y. Y. Jin, Y. Li, and S. L. Zhang, "Observation of two frequency differences in a birefringent He-Ne laser," Opt. Eng. 38, 549-551 (1999).
[CrossRef]

1985 (1)

Chai, X. L.

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

Chen, B. Y.

Cheng, X. H.

Cheng, Z. G.

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

Z. G. Cheng and H. J. Gao, "Maximum achievable velocity measuring of laser interferometers," Chinese patent 200410053304.0 (30 July 2004).

Estler, W. T.

Gao, H. J.

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

Z. G. Cheng and H. J. Gao, "Maximum achievable velocity measuring of laser interferometers," Chinese patent 200410053304.0 (30 July 2004).

Guo, L. D.

Z. F. Zhou, T. Zhang, W. Huang, L. D. Guo, and J. Huang, "Precision ranger for measuring large mechanical components," Appl. Opt. 45, 4816-4820 (2004).
[CrossRef]

Han, Y. M.

Y. M. Han, Y. Y. Jin, Y. Li, and S. L. Zhang, "Observation of two frequency differences in a birefringent He-Ne laser," Opt. Eng. 38, 549-551 (1999).
[CrossRef]

Huang, H. J.

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

Huang, J.

Z. F. Zhou, T. Zhang, W. Huang, L. D. Guo, and J. Huang, "Precision ranger for measuring large mechanical components," Appl. Opt. 45, 4816-4820 (2004).
[CrossRef]

Huang, W.

Z. F. Zhou, T. Zhang, W. Huang, L. D. Guo, and J. Huang, "Precision ranger for measuring large mechanical components," Appl. Opt. 45, 4816-4820 (2004).
[CrossRef]

Jin, Y. Y.

Y. M. Han, Y. Y. Jin, Y. Li, and S. L. Zhang, "Observation of two frequency differences in a birefringent He-Ne laser," Opt. Eng. 38, 549-551 (1999).
[CrossRef]

Lawall, J.

J. Lawall, "Interferometry for accurate displacement metrology," Opt. Photon. News 15, 40-46 (2004).
[CrossRef]

Lee, D. I.

Li, D. C.

Li, Y.

Y. M. Han, Y. Y. Jin, Y. Li, and S. L. Zhang, "Observation of two frequency differences in a birefringent He-Ne laser," Opt. Eng. 38, 549-551 (1999).
[CrossRef]

Ning, Z. G.

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

Roychoudhuri, C.

Steinmetz, C. R.

C. R. Steinmetz, "Laser interferometry operates at submicrometer level," Laser Focus World, July 1990, pp. 93-98.

Zhang, S. L.

Y. M. Han, Y. Y. Jin, Y. Li, and S. L. Zhang, "Observation of two frequency differences in a birefringent He-Ne laser," Opt. Eng. 38, 549-551 (1999).
[CrossRef]

Zhang, T.

Z. F. Zhou, T. Zhang, W. Huang, L. D. Guo, and J. Huang, "Precision ranger for measuring large mechanical components," Appl. Opt. 45, 4816-4820 (2004).
[CrossRef]

Zhou, Z. F.

Z. F. Zhou, T. Zhang, W. Huang, L. D. Guo, and J. Huang, "Precision ranger for measuring large mechanical components," Appl. Opt. 45, 4816-4820 (2004).
[CrossRef]

Appl. Opt. (3)

Opt. Eng. (1)

Y. M. Han, Y. Y. Jin, Y. Li, and S. L. Zhang, "Observation of two frequency differences in a birefringent He-Ne laser," Opt. Eng. 38, 549-551 (1999).
[CrossRef]

Opt. Express (1)

Opt. Photon. News (1)

J. Lawall, "Interferometry for accurate displacement metrology," Opt. Photon. News 15, 40-46 (2004).
[CrossRef]

Proc. SPIE (1)

Z. G. Cheng, H. J. Gao, X. L. Chai, Z. G. Ning, and H. J. Huang, "Study on high accuracy displacement interferometer for lithography application," Proc. SPIE 5662, 395-399 (2004).
[CrossRef]

Other (4)

C. R. Steinmetz, "Laser interferometry operates at submicrometer level," Laser Focus World, July 1990, pp. 93-98.

OEM, "A primer on displacement measuring interferometers," revised January 1999, retrieved November 2005, http://www.zygo.com/products/zmi/dmiprim.pdf.

Agilent Technologies, "Agilent 5529A dynamic calibrator data sheet," March 2001, retrieved November 2005 http://cp.literature.agilent.com/litweb/pdf/5964-9307E.pdf

Z. G. Cheng and H. J. Gao, "Maximum achievable velocity measuring of laser interferometers," Chinese patent 200410053304.0 (30 July 2004).

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Figures (5)

Fig. 1
Fig. 1

Principal diagram of the commercial interferometer.

Fig. 2
Fig. 2

Schematic diagram of the eight-pass-subdivision laser interferometer.

Fig. 3
Fig. 3

Photograph of the experimental setup for measuring the static positioning errors.

Fig. 4
Fig. 4

Measurement results of the static positioning errors.

Fig. 5
Fig. 5

Experimental setup for measuring a free-falling body.

Tables (1)

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Table 1 Laser Interferometer Error Components

Equations (1)

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v = ( 2 g h ) 1 / 2 ,

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