Abstract

We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193  nm. Multilayer capping can provide reflectance of 93.4% at 193  nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90%  to  160  nm.

© 2006 Optical Society of America

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