Abstract

A method is presented for position and displacement measurements of the six degrees of freedom by use of a patterned surface element observed by a static interferometric vision system. The surface element is made of a regular pattern of circular holes etched on a chromium layer deposited onto a flat glass plate. The in-plane coordinates (x, y, θz) are reconstructed with a subpixel resolution by a vision method based on phase measurements. The out-of-plane coordinates (z, θx, θy) are reconstructed by phase-shifting interferometry. Resolutions achieved by the proposed method are in the range of microradians for the measurement of angles and of nanometers for the position and displacement.

© 2005 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]

2003

J. A. Gangloff, M. F. de Mathelin, “High-speed visual servoing of a 6-d. o. f manipulator using multivariable predictive control,” Adv. Rob. 17, 993–1021 (2003).
[CrossRef]

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

2002

P. Sandoz, V. Bonnans, T. Gharbi, “High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method,” App. Opt. 41, 5503–5511 (2002).
[CrossRef]

W. S. Park, H. S. Cho, “Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation,” Opt. Eng. 41, 860–871 (2002).
[CrossRef]

2000

P. Sandoz, J. C. Ravassard, S. Dembelé, A. Janex, “Phase-sensitive vision technique for high accuracy position measurement of moving targets,” IEEE Trans. Instrum. Meas. 49, 867–873 (2000).
[CrossRef]

1997

1994

1993

1987

1985

Beauville, F.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Bonnans, V.

P. Sandoz, V. Bonnans, T. Gharbi, “High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method,” App. Opt. 41, 5503–5511 (2002).
[CrossRef]

P. Sandoz, P. Humbert, V. Bonnans, T. Gharbi, “Procédé de mesure de la localisation d’un objet par détection de phase,” French patent02 02547 (22February2002).

Bushan, B.

Buskulic, D.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Caber, P. J.

Cho, H. S.

W. S. Park, H. S. Cho, “Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation,” Opt. Eng. 41, 860–871 (2002).
[CrossRef]

Creath, K.

K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed., (North-Holland, New York, 1988), Vol. 26, pp. 349–393.
[CrossRef]

de Groot, P.

de Mathelin, M. F.

J. A. Gangloff, M. F. de Mathelin, “High-speed visual servoing of a 6-d. o. f manipulator using multivariable predictive control,” Adv. Rob. 17, 993–1021 (2003).
[CrossRef]

Deck, L.

Dembelé, S.

P. Sandoz, J. C. Ravassard, S. Dembelé, A. Janex, “Phase-sensitive vision technique for high accuracy position measurement of moving targets,” IEEE Trans. Instrum. Meas. 49, 867–873 (2000).
[CrossRef]

Flamino, R.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Gangloff, J. A.

J. A. Gangloff, M. F. de Mathelin, “High-speed visual servoing of a 6-d. o. f manipulator using multivariable predictive control,” Adv. Rob. 17, 993–1021 (2003).
[CrossRef]

Gharbi, T.

P. Sandoz, V. Bonnans, T. Gharbi, “High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method,” App. Opt. 41, 5503–5511 (2002).
[CrossRef]

P. Sandoz, P. Humbert, V. Bonnans, T. Gharbi, “Procédé de mesure de la localisation d’un objet par détection de phase,” French patent02 02547 (22February2002).

Humbert, P.

P. Sandoz, P. Humbert, V. Bonnans, T. Gharbi, “Procédé de mesure de la localisation d’un objet par détection de phase,” French patent02 02547 (22February2002).

Janex, A.

P. Sandoz, J. C. Ravassard, S. Dembelé, A. Janex, “Phase-sensitive vision technique for high accuracy position measurement of moving targets,” IEEE Trans. Instrum. Meas. 49, 867–873 (2000).
[CrossRef]

Katzir, Y.

Koliopoulos, C. L.

Marion, F.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Masserot, A.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Massonet, L.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Mours, B.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Park, W. S.

W. S. Park, H. S. Cho, “Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation,” Opt. Eng. 41, 860–871 (2002).
[CrossRef]

Ramonet, J.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Ravassard, J. C.

P. Sandoz, J. C. Ravassard, S. Dembelé, A. Janex, “Phase-sensitive vision technique for high accuracy position measurement of moving targets,” IEEE Trans. Instrum. Meas. 49, 867–873 (2000).
[CrossRef]

Sandoz, P.

P. Sandoz, V. Bonnans, T. Gharbi, “High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method,” App. Opt. 41, 5503–5511 (2002).
[CrossRef]

P. Sandoz, J. C. Ravassard, S. Dembelé, A. Janex, “Phase-sensitive vision technique for high accuracy position measurement of moving targets,” IEEE Trans. Instrum. Meas. 49, 867–873 (2000).
[CrossRef]

P. Sandoz, “Wavelet transform as a processing tool in white-light interferometry,” Opt. Lett. 22, 1065–1067 (1997).
[CrossRef] [PubMed]

P. Sandoz, P. Humbert, V. Bonnans, T. Gharbi, “Procédé de mesure de la localisation d’un objet par détection de phase,” French patent02 02547 (22February2002).

Strand, T. C.

Tournefier, E.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Verkindt, D.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Veziant, O.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Wyant, J. C.

Yvert, M.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Adv. Rob.

J. A. Gangloff, M. F. de Mathelin, “High-speed visual servoing of a 6-d. o. f manipulator using multivariable predictive control,” Adv. Rob. 17, 993–1021 (2003).
[CrossRef]

App. Opt.

P. Sandoz, V. Bonnans, T. Gharbi, “High-accuracy position and orientation measurement of extended two-dimensional surfaces by a phase-sensitive vision method,” App. Opt. 41, 5503–5511 (2002).
[CrossRef]

Appl. Opt.

IEEE Trans. Instrum. Meas.

P. Sandoz, J. C. Ravassard, S. Dembelé, A. Janex, “Phase-sensitive vision technique for high accuracy position measurement of moving targets,” IEEE Trans. Instrum. Meas. 49, 867–873 (2000).
[CrossRef]

Opt. Eng.

W. S. Park, H. S. Cho, “Measurement of fine 6-degrees-of-freedom displacement of rigid bodies through splitting a laser beam: experimental investigation,” Opt. Eng. 41, 860–871 (2002).
[CrossRef]

Opt. Lett.

Rev. Sci. Instrum.

F. Beauville, D. Buskulic, R. Flamino, F. Marion, A. Masserot, L. Massonet, B. Mours, J. Ramonet, E. Tournefier, D. Verkindt, O. Veziant, M. Yvert, “A camera based position control of a suspended optical bench used in a gravitational wave detector,” Rev. Sci. Instrum. 74, 2564–2569 (2003).
[CrossRef]

Other

P. Sandoz, P. Humbert, V. Bonnans, T. Gharbi, “Procédé de mesure de la localisation d’un objet par détection de phase,” French patent02 02547 (22February2002).

K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed., (North-Holland, New York, 1988), Vol. 26, pp. 349–393.
[CrossRef]

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Figures (7)

Fig. 1
Fig. 1

Two-dimensional spot distribution used as the phase reference pattern (actual pattern period: 10 μm).

Fig. 2
Fig. 2

Perpendicular one-directional gratings as reconstructed by Fourier-domain filtering of the phase reference pattern of Fig. 1. (The one-directional gratings are represented beside each other for necessity, but, in fact, they are computed within two distinct images at the same coordinates as the original dot distribution.)

Fig. 3
Fig. 3

Profile of the patterned surface element as measured by PSI. Actual area: 182.6 μm by 180.5 μm; full scale: 312.3 nm.

Fig. 4
Fig. 4

Profile of the patterned surface element after the mean plane removal. Actual area: 182.6 μm by 180.5 μm; full scale: 35.2 nm.

Fig. 5
Fig. 5

Interference microscope used for position sensing.

Fig. 6
Fig. 6

XYZ position deviation measured for 100 measurements without target displacement.

Fig. 7
Fig. 7

XYZ displacements measured while a “Femto-ST” drive signal was applied to the PZT. Total excursion: 2.589 μm in X, 2.664 μm in Y, 87.9 nm in Z. (The inset shows the driving signal applied.)

Tables (1)

Tables Icon

Table 1 Statistical Results Obtained from 100 Measurements without Target Displacement

Metrics