Abstract

An accurate numerical simulation study of a polarization conversion phenomenon in deeply etched semiconductor electro-optic waveguide modulators is presented. Based on a powerful and versatile finite element package, the effect of various imperfect fabrication conditions on unwanted and unexpected polarization conversion in electro-optic semiconductor modulators is, for the first time to our knowledge reported and explained in terms of its origin.

© 2005 Optical Society of America

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