Abstract

We report on the linear optical properties of TeOx films deposited by radio-frequency reactive sputtering on fused-silica substrates. The oxygen stoichiometry ranges from x = 1.95 to x = 2.75, as experimentally determined by Rutherford backscattering. The complex dielectric function of TeOx samples has been measured in the range from λ = 260 nm to λ = 1700 nm by variable angle spectroscopic ellipsometry. All samples are transparent in the visible and near infrared. Regarding the refractive index measured at λ = 1.5 μm, Δn variations from 0.5% to 7% were found, with the general trend monotonically decreasing with respect to the oxygen content. This opens the possibility to easily implement TeOx-based multiplayer structures, with a fine tuning of the index, which could be of particular interest for applications in optical communications.

© 2005 Optical Society of America

Full Article  |  PDF Article
More Like This
Optical properties of GeOx films obtained by laser deposition and dc sputtering in a reactive atmosphere

F. Vega, J. C. G. de Sande, C. N. Afonso, C. Ortega, and J. Siejka
Appl. Opt. 33(7) 1203-1208 (1994)

High-contrast waveguides in sputtered pure TeO2 glass thin films

Silvia Maria Pietralunga, Marta Lanata, Massimo Ferè, Davide Piccinin, Giuseppe Cusmai, Matteo Torregiani, and Mario Martinelli
Opt. Express 16(26) 21662-21670 (2008)

Effects of bombardment on optical properties during the deposition of silicon nitride by reactive ion-beam sputtering

M. F. Lambrinos, R. Valizadeh, and J. S. Colligon
Appl. Opt. 35(19) 3620-3626 (1996)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics