Abstract

Reflection measurements in the 25–35 nm region were made for Mg/SiC and Mg/Y2O3 multilayers kept in a low-humidity atmosphere for 4 or 5 years. Aged Mg/SiC multilayers keep their reflectances, and the reflectance value at 31.2 nm is 0.44 at 10° of the normal angle of incidence. Aged Mg/Y2O3 multilayers change reflectance as top layer materials, and the best value at 30.1 nm is 0.40 at 10°. Reflection measurements are also made for Mg-based multilayers that are annealed from room temperature to 400 °C at 50 °C intervals. Both multilayers keep their reflectance at annealing temperatures of 200 °C. These results suggest that both Mg-based multilayers can be applied to practical optics.

© 2005 Optical Society of America

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2004 (1)

D. L. Windt, S. Donguy, J. Seely, B. Kjornattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.1835–1848 (2004).
[Crossref] [PubMed]

2002 (2)

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Y. Kondo, T. Ejima, H. Takatsuka, M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett.521–527 (2002).
[Crossref]

2001 (2)

T. Ejima, Y. Kondo, M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.376–379 (2001).
[Crossref]

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

1998 (2)

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

D. L. Windt, “IMD—software for modeling the optical properties of multilayer films,” Comput. Phys.360–370 (1998).
[Crossref]

1991 (1)

D. K. G. de Boer, “Glancing-incidence x-ray fluorescence of layered materials,” Phys. Rev. B498–511 (1991).
[Crossref]

1990 (1)

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

1989 (2)

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

D. G. Stearns, “The scattering of x rays from nonideal multilayer structures,” J. Appl. Phys.491–506 (1989).
[Crossref]

1980 (1)

L. Nevot, P. Croce, “Characterization of surfaces by grazing x-ray reflection. Application to the study of polishing some silicate glasses,” Rev. Phys. Appl.761–779 (1980).

1954 (1)

L. G. Parratt, “Surface studies of solids by total reflection of x-rays,” Phys. Rev.359–369 (1954).
[Crossref]

Artzner, G.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Attwood, D.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Auchere, F.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Backus, S.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Bartels, R. A.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Bothmer, V.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Bougnet, M.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Bouyries, P.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Bridou, F.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Cannon, J. C.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Carpenter, B. A.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Christov, I. P.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Clotaire, J.-Y.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Colas, G.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Croce, P.

L. Nevot, P. Croce, “Characterization of surfaces by grazing x-ray reflection. Application to the study of polishing some silicate glasses,” Rev. Phys. Appl.761–779 (1980).

de Boer, D. K. G.

D. K. G. de Boer, “Glancing-incidence x-ray fluorescence of layered materials,” Phys. Rev. B498–511 (1991).
[Crossref]

D. K. G. de Boer, Win-Gixa computer program and reference manual, (Philips Japan Ltd., Tokyo, Japan, 1997).

Delaboudiniere, J. P.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Delaboudiniere, J.-P.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Delmotte, F.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Deutsch, W.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Donguy, S.

D. L. Windt, S. Donguy, J. Seely, B. Kjornattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.1835–1848 (2004).
[Crossref] [PubMed]

Duncan, D. W.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Ejima, T.

Y. Kondo, T. Ejima, H. Takatsuka, M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett.521–527 (2002).
[Crossref]

T. Ejima, Y. Kondo, M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.376–379 (2001).
[Crossref]

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

Fedorenko, A.-I.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Fedotov, V. Yu.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
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Fujita, J.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
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Fukui, K.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
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J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Green, H.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Hatano, T.

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

Howard, R. A.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Ishiguro, E.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Jacobsen, C.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

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J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
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M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Kameda, S.

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
[Crossref]

Kapteyn, H. C.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

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S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

Kjornattanawanich, B.

D. L. Windt, S. Donguy, J. Seely, B. Kjornattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.1835–1848 (2004).
[Crossref] [PubMed]

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Y. Kondo, T. Ejima, H. Takatsuka, M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett.521–527 (2002).
[Crossref]

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

T. Ejima, Y. Kondo, M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.376–379 (2001).
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Kondratenko, V. V.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Lamare, M.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Lemen, J. R.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Levashov, V. E.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Liu, Y.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Mercier, R.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Meyer, S. B.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Moore, A. S.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Morita, S.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Moses, J. D.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Mullot, M.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Murachi, T.

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
[Crossref]

Murnane, M. M.

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Nakamura, E.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Nakamura, M.

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
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Nakayama, S.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

Namioka, T.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

Navarro, R. L.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
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L. Nevot, P. Croce, “Characterization of surfaces by grazing x-ray reflection. Application to the study of polishing some silicate glasses,” Rev. Phys. Appl.761–779 (1980).

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J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
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Okano, S.

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
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R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Pearson, J. D.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Pershin, Yu. P.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Ravet, M. F.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Ravet, M.-F.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Rossi, G. R.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Saito, K.

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

Sakai, K.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Sakurai, M.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Seely, J.

D. L. Windt, S. Donguy, J. Seely, B. Kjornattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.1835–1848 (2004).
[Crossref] [PubMed]

Song, X.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
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Spiller, E.

For example, E. Spiller, Soft X-ray Optics (SPIE Press, 1994), pp. 267–274.
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Springer, L. A.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Stearns, D. G.

D. G. Stearns, “The scattering of x rays from nonideal multilayer structures,” J. Appl. Phys.491–506 (1989).
[Crossref]

Takatsuka, H.

Y. Kondo, T. Ejima, H. Takatsuka, M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett.521–527 (2002).
[Crossref]

Tarbell, T. D.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Uspenskii, Yu. A.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Vinogradov, A. V.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Watanabe, M.

Y. Kondo, T. Ejima, H. Takatsuka, M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett.521–527 (2002).
[Crossref]

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

T. Ejima, Y. Kondo, M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.376–379 (2001).
[Crossref]

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Windt, D. L.

D. L. Windt, S. Donguy, J. Seely, B. Kjornattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.1835–1848 (2004).
[Crossref] [PubMed]

D. L. Windt, “IMD—software for modeling the optical properties of multilayer films,” Comput. Phys.360–370 (1998).
[Crossref]

Wolfson, C. J.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Wulser, J.-P.

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

Yamamoto, M.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

Yamashita, K.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Yamazaki, A.

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
[Crossref]

Yanagihara, M.

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

Yonezu, H.

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Yoshikawa, I.

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
[Crossref]

Zhang-Song, X.

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

Zubarev, E. N.

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Appl. Opt. (1)

D. L. Windt, S. Donguy, J. Seely, B. Kjornattanawanich, “Experimental comparison of extreme-ultraviolet multilayers for solar physics,” Appl. Opt.1835–1848 (2004).
[Crossref] [PubMed]

Comput. Phys. (1)

D. L. Windt, “IMD—software for modeling the optical properties of multilayer films,” Comput. Phys.360–370 (1998).
[Crossref]

J. Appl. Phys. (1)

D. G. Stearns, “The scattering of x rays from nonideal multilayer structures,” J. Appl. Phys.491–506 (1989).
[Crossref]

Jpn. J. Appl. Phys. (1)

T. Ejima, Y. Kondo, M. Watanabe, “Two-color reflection multilayers for He-I and He-II resonance lines for microscopic ultraviolet photoelectron spectroscopy using Schwarzschild objective,” Jpn. J. Appl. Phys.376–379 (2001).
[Crossref]

Nucl. Instrum. Methods Phys. Res. A (1)

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe, “High-reflection multilayer for wavelength range of 200–30 nm,” Nucl. Instrum. Methods Phys. Res. A333–336 (2001).
[Crossref]

Opt. Lett. (1)

Yu. A. Uspenskii, V. E. Levashov, A. V. Vinogradov, A.-I. Fedorenko, V. V. Kondratenko, Yu. P. Pershin, E. N. Zubarev, V. Yu. Fedotov, “High-reflectivity multilayer mirrors for a vacuum-ultraviolet interval of 35–50 nm,” Opt. Lett.771–773 (1998).
[Crossref]

Phys. Rev. (1)

L. G. Parratt, “Surface studies of solids by total reflection of x-rays,” Phys. Rev.359–369 (1954).
[Crossref]

Phys. Rev. B (1)

D. K. G. de Boer, “Glancing-incidence x-ray fluorescence of layered materials,” Phys. Rev. B498–511 (1991).
[Crossref]

Phys. Scr. (1)

S. Nakayama, M. Yanagihara, M. Yamamoto, H. Kimura, T. Namioka, “Soft x-ray reflectometer with a laser-produced plasma source,” Phys. Scr.754–757 (1990).
[Crossref]

Rev. Phys. Appl. (1)

L. Nevot, P. Croce, “Characterization of surfaces by grazing x-ray reflection. Application to the study of polishing some silicate glasses,” Rev. Phys. Appl.761–779 (1980).

Rev. Sci. Instrum. (1)

M. Sakurai, S. Morita, J. Fujita, H. Yonezu, K. Fukui, K. Sakai, E. Nakamura, M. Watanabe, E. Ishiguro, K. Yamashita, “A plane-grating monochromator for radiometric calibration,” Rev. Sci. Instrum.2089–2092 (1989).
[Crossref]

Science (1)

R. A. Bartels, A. Paul, H. Green, H. C. Kapteyn, M. M. Murnane, S. Backus, I. P. Christov, Y. Liu, D. Attwood, C. Jacobsen, “Generation of spatially coherent light at extreme ultraviolet wavelengths,” Science376–378 (2002).
[PubMed]

Surf. Rev. Lett. (1)

Y. Kondo, T. Ejima, H. Takatsuka, M. Watanabe, “Microscopic ultraviolet photoelectron spectroscopy using He-I and He-II resonance lines,” Surf. Rev. Lett.521–527 (2002).
[Crossref]

Other (9)

J. A. Samson, D. L. Ederer, eds., Vacuum Ultraviolet Spectroscopy I and II (Academic, 2000).

M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J. P. Delaboudiniere, “Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics,” in Advances in Optical Thin Films, C. Amra, N. Kaiser, H. A. Macleod, eds., Proc. SPIE99–108 (2004).
[Crossref]

J.-P. Wulser, J. R. Lemen, T. D. Tarbell, C. J. Wolfson, J. C. Cannon, B. A. Carpenter, D. W. Duncan, G. S. Gradwohl, S. B. Meyer, A. S. Moore, R. L. Navarro, J. D. Pearson, G. R. Rossi, L. A. Springer, R. A. Howard, J. D. Moses, J. S. Newmark, J.-P. Delaboudiniere, G. Artzner, F. Auchere, M. Bougnet, P. Bouyries, F. Bridou, J.-Y. Clotaire, G. Colas, F. Delmotte, A. Jerome, M. Lamare, R. Mercier, M. Mullot, M.-F. Ravet, X. Song, V. Bothmer, W. Deutsch, “EUVI: the STEREOSECCHI extreme ultraviolet imager,” in Telescopes and Instrumentation for Solar Astrophysics, S. Fineschi, M. A. Gummin, eds., Proc. SPIE111–122 (2004).
[Crossref]

I. Yoshikawa, T. Murachi, S. Kameda, A. Yamazaki, S. Okano, M. Nakamura, “Development of an extreme ultraviolet imaging spectrometer for the Mercury mission,” in Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications, A. M. Khounsary, U. Dinger, K. Ota, eds., Proc. SPIE164–171 (2004).
[Crossref]

For example, E. Spiller, Soft X-ray Optics (SPIE Press, 1994), pp. 267–274.
[Crossref]

D. K. G. de Boer, Win-Gixa computer program and reference manual, (Philips Japan Ltd., Tokyo, Japan, 1997).

For example, Ref. 5, Chap. 16.

B. L. Henke, E. M. Gullikson, J. C. Davis, At. Data Nucl. Data Tables181 (1993), http://www-cxro.lbl.gov/optical_constants/ .

ASM Handbook Committee, eds., Metals Handbook, 9th ed. (American Society for Metals, 1979), Vol. 2.

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Figures (8)

Fig. 1
Fig. 1

Reflectances of the number 452 Mg/SiC multilayer (a) after 4 years’ storage and (b) before storage.

Fig. 2
Fig. 2

Reflectances of (a) number 284 and (b) number 285 Mg/Y2O3 multilayers after 5 years’ storage; “exp” and “err” represent IP functions used in the simulations.

Fig. 3
Fig. 3

(a) Reflectances calculated for changing thickness ratios γ and (b) changes of reflectances (Ref.) and bandwidths (FWHM) at peak positions.

Fig. 4
Fig. 4

GIXRD spectra of Mg/Y2O3 multilayers that have been heated in an Ar atmosphere from RT to 400 °C at 50 °C intervals.

Fig. 5
Fig. 5

(a) Periodic lengths at each annealing temperature obtained from the Bragg peak positions of GIXRD data. (b) Intensity ratio of the second Bragg peak of each annealing temperature normalized by that of RT.

Fig. 6
Fig. 6

(a) Reflectances of Mg/Y2O3 multilayers annealed from 150 °C to 300 °C at 50 °C intervals. (b) Relative reflectance of each annealing temperature normalized by that of RT.

Fig. 7
Fig. 7

(a) Roughness values and thicknesses of (b) Mg and (c) Y2O3 layers obtained from comparisons of GIXRD data with simulations. σMg/Y2O3 and σY2O3/Mg are surface-side roughness values of Mg and Y2O3 layers, respectively.

Fig. 8
Fig. 8

Measured and calculated reflectances of annealed Mg/Y2O3 multilayers. “exp” and “err” represent IP functions used in the simulations, and σMg/Y2O3 and σY2O3/Mg are surface-side roughness values of the Mg and Y2O3 layers, respectively.

Tables (3)

Tables Icon

Table 1 Multilayers Measured after 4 or 5 Years of Storagea

Tables Icon

Table 2 Periodic Lengths and Layer Structures Obtained from the GIXRD Data Before and After Storagea

Tables Icon

Table 3 Reflectance 10° of the Normal Angle of Incidence and Bandwidth at Peak Positions

Metrics