Abstract

Reflection measurements in the 25–35 nm region were made for Mg/SiC and Mg/Y2O3 multilayers kept in a low-humidity atmosphere for 4 or 5 years. Aged Mg/SiC multilayers keep their reflectances, and the reflectance value at 31.2 nm is 0.44 at 10° of the normal angle of incidence. Aged Mg/Y2O3 multilayers change reflectance as top layer materials, and the best value at 30.1 nm is 0.40 at 10°. Reflection measurements are also made for Mg-based multilayers that are annealed from room temperature to 400 °C at 50 °C intervals. Both multilayers keep their reflectance at annealing temperatures of 200 °C. These results suggest that both Mg-based multilayers can be applied to practical optics.

© 2005 Optical Society of America

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