Abstract

A phase-shifting interferometry (PSI) with equal phase steps by use of a frequency-tunable diode laser and a Fabry–Perot cavity is proposed for the Carré algorithm. The measurement accuracy of the Carré algorithm depends on the equality of the phase steps. Using the Fabry–Perot cavity as a highly stable optical frequency reference, a high degree of phase step equality can be realized in PSI with an optical frequency shift. Our experimental scheme realizes an optical frequency step equality higher than 5.1 × 10−5 and a measurement repeatability of λ/800.

© 2005 Optical Society of America

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