We describe a technique for the measurement of non-full-field reflective surfaces by using phase-stepping profilometry. We explain the principles of phase demodulation and discuss three-dimensional (3-D) height reconstruction in the case of measuring surfaces with reflective properties such as plain glass and mirrored glass. A number of required calibration algorithms are described to obtain surface slopes and reconstructed 3-D heights of the whole surface. Masking for non-full-field objects and the surface reconstruction procedure are demonstrated mathematically and algorithmically. Several experimental results are given for glass with different shapes and defects. Measurement of a spherical mirror with a known radius has also allowed us to show the performance of the proposed technique. This allows for the possibility to compare 3-D data from the known object with data taken from the measurement system.
© 2005 Optical Society of AmericaFull Article | PDF Article
Oleksandr A. Skydan, Michael J. Lalor, and David R. Burton
Appl. Opt. 41(29) 6104-6117 (2002)
Jun Zhang, Changhe Zhou, and Xiaoxin Wang
Appl. Opt. 48(19) 3709-3715 (2009)
Fatemeh Mohammadi, Khosro Madanipour, and Amir Hossein Rezaie
Appl. Opt. 51(16) 3120-3131 (2012)