Abstract

A novel ring configuration for phase-shifting interferometry with external phase-shifting control is presented. The device is a polarization (ring) interferometer, in which the reference and test arms are parts of the same collimated beam. The key point is to manage the polarization of the light such that orthogonal linear polarizations describe counterpropagating paths in the ring interferometer. The phase shift between the two waves is externally controlled with a Pockels cell, which permits fast phase modulation without the need for moving parts inside the interferometer.

© 2005 Optical Society of America

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References

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  1. J. E. Greivenkamp, J. H. Bruning, “Phase-shifting interferometry,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 501–598.
  2. M. Kujawinska, “Spatial phase measurement methods,” in Interferogram Analysis, D. Robinson, G. Reid, eds. (IOP Publishing, 1993), Sec. 5.3.
  3. E. M. Frins, W. Dultz, J. A. Ferrari, “Polarization shifting method for step interferometry,” Pure Appl. Opt. 7, 53–60 (1998).
    [CrossRef]
  4. J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef] [PubMed]
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    [CrossRef]
  10. M. V. Mantravadi, “Lateral shearing interferometers,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 123–172.
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    [CrossRef] [PubMed]

2002

J. A. Ferrari, E. Garbusi, E. M. Frins, “Modified Michelson interferometer with electrooptic phase control,” Opt. Commun. 209, 245–253 (2002).
[CrossRef]

J. A. Ferrari, E. M. Frins, “One-beam interferometer by beam folding,” Appl. Opt. 41, 5313–5316 (2002).
[CrossRef] [PubMed]

1999

J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
[CrossRef]

1998

E. M. Frins, W. Dultz, J. A. Ferrari, “Polarization shifting method for step interferometry,” Pure Appl. Opt. 7, 53–60 (1998).
[CrossRef]

1997

1990

1983

1974

Brangaccio, D.

Bruning, J.

Bruning, J. H.

J. E. Greivenkamp, J. H. Bruning, “Phase-shifting interferometry,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 501–598.

Burow, R.

Cherng, C.-P.

Dubra, A.

J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
[CrossRef]

Dultz, W.

E. M. Frins, W. Dultz, J. A. Ferrari, “Polarization shifting method for step interferometry,” Pure Appl. Opt. 7, 53–60 (1998).
[CrossRef]

Elssner, K.-E.

Ferrari, J. A.

J. A. Ferrari, E. Garbusi, E. M. Frins, “Modified Michelson interferometer with electrooptic phase control,” Opt. Commun. 209, 245–253 (2002).
[CrossRef]

J. A. Ferrari, E. M. Frins, “One-beam interferometer by beam folding,” Appl. Opt. 41, 5313–5316 (2002).
[CrossRef] [PubMed]

J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
[CrossRef]

E. M. Frins, W. Dultz, J. A. Ferrari, “Polarization shifting method for step interferometry,” Pure Appl. Opt. 7, 53–60 (1998).
[CrossRef]

Frins, E. M.

J. A. Ferrari, E. Garbusi, E. M. Frins, “Modified Michelson interferometer with electrooptic phase control,” Opt. Commun. 209, 245–253 (2002).
[CrossRef]

J. A. Ferrari, E. M. Frins, “One-beam interferometer by beam folding,” Appl. Opt. 41, 5313–5316 (2002).
[CrossRef] [PubMed]

J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
[CrossRef]

E. M. Frins, W. Dultz, J. A. Ferrari, “Polarization shifting method for step interferometry,” Pure Appl. Opt. 7, 53–60 (1998).
[CrossRef]

Gallagher, J.

Garbusi, E.

J. A. Ferrari, E. Garbusi, E. M. Frins, “Modified Michelson interferometer with electrooptic phase control,” Opt. Commun. 209, 245–253 (2002).
[CrossRef]

Greivenkamp, J. E.

J. E. Greivenkamp, J. H. Bruning, “Phase-shifting interferometry,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 501–598.

Grzanna, J.

Herriot, D.

Kujawinska, M.

M. Kujawinska, “Spatial phase measurement methods,” in Interferogram Analysis, D. Robinson, G. Reid, eds. (IOP Publishing, 1993), Sec. 5.3.

Mantravadi, M. V.

M. V. Mantravadi, “Lateral shearing interferometers,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 123–172.

McInerney, J. G.

Merkel, K.

Osifiski, M.

Perciante, C. D.

J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
[CrossRef]

Rosenfeld, D.

Salvi, Th. C.

Schreiber, H.

Schwider, J.

Spolaczyk, R.

White, D.

Appl. Opt.

Opt. Commun.

J. A. Ferrari, E. Garbusi, E. M. Frins, “Modified Michelson interferometer with electrooptic phase control,” Opt. Commun. 209, 245–253 (2002).
[CrossRef]

Opt. Lett.

J. A. Ferrari, E. M. Frins, C. D. Perciante, A. Dubra, “Robust one-beam interferometer with phase-delay control,” Opt. Lett. 7, 1272–1274 (1999).
[CrossRef]

Pure Appl. Opt.

E. M. Frins, W. Dultz, J. A. Ferrari, “Polarization shifting method for step interferometry,” Pure Appl. Opt. 7, 53–60 (1998).
[CrossRef]

Other

J. E. Greivenkamp, J. H. Bruning, “Phase-shifting interferometry,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 501–598.

M. Kujawinska, “Spatial phase measurement methods,” in Interferogram Analysis, D. Robinson, G. Reid, eds. (IOP Publishing, 1993), Sec. 5.3.

M. V. Mantravadi, “Lateral shearing interferometers,” in Optical Shop Testing, D. Malacara, ed., 2nd ed. (Wiley, 1992), pp. 123–172.

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Figures (2)

Fig. 1
Fig. 1

Proposed phase-shifting ring interferometer. The plane of the figure is the (x, y) plane. PL, linearly polarized laser; PC, Pockels cell; SF, spatial filter; L, collimation lens; PO, test phase object; PBS, polarizing beam splitter; M1, M2, mirrors; P, polarizer at 45° with respect to the incident polarization directions; C, a digital camera with which to acquire the interferograms.

Fig. 2
Fig. 2

(a), (b), (c) Three interferograms with phase delays Δn = nπ/2, with n = 0, 1, 2, respectively.

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