In this study an analytical model that takes into account the coupled photoelastic and thermo-optical effects is established to evaluate the temperature dependence of a single-chip silicon micromachined Fabry–Perot pressure sensor. The results show that temperature variation has a significant effect on the performance of a micromachined Fabry–Perot pressure sensor with a conventional flat diaphragm. A new membrane-type silicon micromachined Fabry–Perot pressure sensor with a novel deeply corrugated diaphragm is then proposed. The sensor is fabricated on a single-chip by use of both surface- and bulk-micromachining techniques. Both analytical and experimental results show that the cross sensitivity of Fabry–Perot pressure sensors to temperature can be substantially alleviated by use of the proposed single deeply corrugated diaphragm.
© 2005 Optical Society of America
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