Abstract

We propose a method for designing a self-aligned microlens. We have improved its fabrication by employing metallization on a 45° angled surface of the optical fiber. We designed the focal length of the microlens to be 14.0 µm, considering the dimensions of a scanning near-field optical microscopy (SNOM) probe, and we calculated possible dimensions of diameter and height by the ray-tracing method. The modeling of lens formation was also carried out with two assumptions: no volume change and no movement of peripheral parts of the photoresist (PR) on the substrate during reflow. To fabricate a microlens of diameter 16.0 µm and height 5.0 µm we exposed a coated PR to UV light guided into the optical fiber, followed by optimized reflow of 150 °C for 2 min. For this microlens the focal length and the beam waist were 14.0 and 1.4 µm, respectively. This lens can be used for compact optical data storage.

© 2005 Optical Society of America

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