Abstract

A damage test procedure was established for optical components that have large incident beam footprints. The procedure was applied on coated samples for a high-powered 1053-nm, 3-ns pulse-length laser system.

© 2005 Optical Society of America

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  1. Substrates were polished either by Bond Optics or by the coating supplier. Antireflective coatings were supplied by CVI Lasers, Rocky Mountain Instruments, Spectra-Physics, Thin Film Labs, and ZC&R. High reflector coatings were supplied by Newport Corp, REOSC, Rocky Mountain Instruments, Spectrum Thin Films, Spectra-Physics, and TecOptics. Polarizer coatings were supplied by Alpine Research Optics, CVI Lasers, Rocky Mountain Instruments, and Spectra-Physics.
  2. R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).
  3. M. R. Kozlowski, R. Chow, “The role of defects in laser damage of multilayer coatings,” in Laser-Induced Damage in Optical Materials: 1993, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2114, 640–649 (1994).
  4. International Organization for Standards, Optics and Optical Instruments—Preparation of Drawings for Optical Systems, Part 13: Laser Irradiation Damage Threshold, ISO 10110-13 Standards (International Organization for Standards, Geneva, 1997).
  5. L. Sheehan, J. Hendrix, C. Battersby, S. Oberhelman, “NIF small optics laser-induced damage and photometry measurements program,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE3782, 518–524 (1999).
  6. R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
    [CrossRef]
  7. M. Runkel, “Report for trip to Big Sky Laser Technologies,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2003).
  8. F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).
  9. S. R. Foltyn, L. J. Jolin, “Long-range pulse-length scaling of 351 nm laser damage thresholds,” in Proceedings on Laser Induced Damage in Optical Materials: 1986, NIST Spec. Publ.752, 336–343 (1981).
  10. M. D. Crisp, N. L. Boling, G. Dube, “Importance of Fresnel reflections in laser surface damage of transparent dielectrics,” Appl. Phys. Lett. 21, 364–366 (1972).
    [CrossRef]
  11. M. D. Feit, Lawrence Livermore National Laboratory, P.O. Box 808, Livermore, Calif. 94550 (private communications, 2004).
  12. R. J. Tench, R. Chow, M. R. Kozlowski, “Characterization of defect geometries in multilayer optical coatings,” J. Vac. Sci. Technol. A 12, 2808–2813 (1994).
    [CrossRef]

1994

R. J. Tench, R. Chow, M. R. Kozlowski, “Characterization of defect geometries in multilayer optical coatings,” J. Vac. Sci. Technol. A 12, 2808–2813 (1994).
[CrossRef]

1972

M. D. Crisp, N. L. Boling, G. Dube, “Importance of Fresnel reflections in laser surface damage of transparent dielectrics,” Appl. Phys. Lett. 21, 364–366 (1972).
[CrossRef]

Atherton, L. J.

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

Battersby, C.

L. Sheehan, J. Hendrix, C. Battersby, S. Oberhelman, “NIF small optics laser-induced damage and photometry measurements program,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE3782, 518–524 (1999).

Becker, D.

R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).

Boling, N. L.

M. D. Crisp, N. L. Boling, G. Dube, “Importance of Fresnel reflections in laser surface damage of transparent dielectrics,” Appl. Phys. Lett. 21, 364–366 (1972).
[CrossRef]

Campbell, J. H.

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

Chow, R.

R. J. Tench, R. Chow, M. R. Kozlowski, “Characterization of defect geometries in multilayer optical coatings,” J. Vac. Sci. Technol. A 12, 2808–2813 (1994).
[CrossRef]

R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).

R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
[CrossRef]

M. R. Kozlowski, R. Chow, “The role of defects in laser damage of multilayer coatings,” in Laser-Induced Damage in Optical Materials: 1993, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2114, 640–649 (1994).

Crisp, M. D.

M. D. Crisp, N. L. Boling, G. Dube, “Importance of Fresnel reflections in laser surface damage of transparent dielectrics,” Appl. Phys. Lett. 21, 364–366 (1972).
[CrossRef]

DeMarco, F. P.

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

Dube, G.

M. D. Crisp, N. L. Boling, G. Dube, “Importance of Fresnel reflections in laser surface damage of transparent dielectrics,” Appl. Phys. Lett. 21, 364–366 (1972).
[CrossRef]

Eickelberg, W. K.

R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
[CrossRef]

Feit, M. D.

M. D. Feit, Lawrence Livermore National Laboratory, P.O. Box 808, Livermore, Calif. 94550 (private communications, 2004).

Foltyn, S. R.

S. R. Foltyn, L. J. Jolin, “Long-range pulse-length scaling of 351 nm laser damage thresholds,” in Proceedings on Laser Induced Damage in Optical Materials: 1986, NIST Spec. Publ.752, 336–343 (1981).

Hendrix, J.

L. Sheehan, J. Hendrix, C. Battersby, S. Oberhelman, “NIF small optics laser-induced damage and photometry measurements program,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE3782, 518–524 (1999).

Jolin, L. J.

S. R. Foltyn, L. J. Jolin, “Long-range pulse-length scaling of 351 nm laser damage thresholds,” in Proceedings on Laser Induced Damage in Optical Materials: 1986, NIST Spec. Publ.752, 336–343 (1981).

Kozlowski, M. R.

R. J. Tench, R. Chow, M. R. Kozlowski, “Characterization of defect geometries in multilayer optical coatings,” J. Vac. Sci. Technol. A 12, 2808–2813 (1994).
[CrossRef]

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

M. R. Kozlowski, R. Chow, “The role of defects in laser damage of multilayer coatings,” in Laser-Induced Damage in Optical Materials: 1993, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2114, 640–649 (1994).

McBurney, M.

R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
[CrossRef]

Morgan, A. J.

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

Oberhelman, S.

L. Sheehan, J. Hendrix, C. Battersby, S. Oberhelman, “NIF small optics laser-induced damage and photometry measurements program,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE3782, 518–524 (1999).

Rainer, F.

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

Runkel, M.

R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).

M. Runkel, “Report for trip to Big Sky Laser Technologies,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2003).

Sheehan, L.

L. Sheehan, J. Hendrix, C. Battersby, S. Oberhelman, “NIF small optics laser-induced damage and photometry measurements program,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE3782, 518–524 (1999).

Staggs, M. C.

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

Taylor, J. R.

R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).

Tench, R. J.

R. J. Tench, R. Chow, M. R. Kozlowski, “Characterization of defect geometries in multilayer optical coatings,” J. Vac. Sci. Technol. A 12, 2808–2813 (1994).
[CrossRef]

Thomas, M. D.

R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
[CrossRef]

Weber, P.

R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).

Williams, W. H.

R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
[CrossRef]

Appl. Phys. Lett.

M. D. Crisp, N. L. Boling, G. Dube, “Importance of Fresnel reflections in laser surface damage of transparent dielectrics,” Appl. Phys. Lett. 21, 364–366 (1972).
[CrossRef]

J. Vac. Sci. Technol. A

R. J. Tench, R. Chow, M. R. Kozlowski, “Characterization of defect geometries in multilayer optical coatings,” J. Vac. Sci. Technol. A 12, 2808–2813 (1994).
[CrossRef]

Other

M. D. Feit, Lawrence Livermore National Laboratory, P.O. Box 808, Livermore, Calif. 94550 (private communications, 2004).

Substrates were polished either by Bond Optics or by the coating supplier. Antireflective coatings were supplied by CVI Lasers, Rocky Mountain Instruments, Spectra-Physics, Thin Film Labs, and ZC&R. High reflector coatings were supplied by Newport Corp, REOSC, Rocky Mountain Instruments, Spectrum Thin Films, Spectra-Physics, and TecOptics. Polarizer coatings were supplied by Alpine Research Optics, CVI Lasers, Rocky Mountain Instruments, and Spectra-Physics.

R. Chow, M. Runkel, J. R. Taylor, D. Becker, P. Weber, “Small optics laser damage test procedure,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2001).

M. R. Kozlowski, R. Chow, “The role of defects in laser damage of multilayer coatings,” in Laser-Induced Damage in Optical Materials: 1993, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE2114, 640–649 (1994).

International Organization for Standards, Optics and Optical Instruments—Preparation of Drawings for Optical Systems, Part 13: Laser Irradiation Damage Threshold, ISO 10110-13 Standards (International Organization for Standards, Geneva, 1997).

L. Sheehan, J. Hendrix, C. Battersby, S. Oberhelman, “NIF small optics laser-induced damage and photometry measurements program,” in Optical Manufacturing and Testing II, H. P. Stahl, ed., Proc. SPIE3782, 518–524 (1999).

R. Chow, M. McBurney, W. K. Eickelberg, W. H. Williams, M. D. Thomas, “Correlation of test data from some NIF small optical components,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 384–393 (2001).
[CrossRef]

M. Runkel, “Report for trip to Big Sky Laser Technologies,” (Lawrence Livermore National Laboratory, Livermore, Calif., 2003).

F. Rainer, L. J. Atherton, J. H. Campbell, F. P. DeMarco, M. R. Kozlowski, A. J. Morgan, M. C. Staggs, “Four-harmonic database of laser damage testing,” in Laser-Induced Damage in Optical Materials: 1991, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1624, 116–127 (1992).

S. R. Foltyn, L. J. Jolin, “Long-range pulse-length scaling of 351 nm laser damage thresholds,” in Proceedings on Laser Induced Damage in Optical Materials: 1986, NIST Spec. Publ.752, 336–343 (1981).

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Figures (5)

Fig. 1
Fig. 1

Pulse-length-scaled thresholds of AR coatings. An exponent of 0.35 was used in Eq. (1) to scale the thresholds taken at 10 to 3 ns. The slope is 1.04 ± 0.11, and the correlation is 65%.

Fig. 2
Fig. 2

Laser damage thresholds of HR coatings. The ideal-fit line is the 1:1 line. The pulse-length exponent is 0 for HR coatings designed for 1064 nm at a 45° angle of incidence, the slope is 1.02 ± 0.06, and the correlation is 79%.

Fig. 3
Fig. 3

Pulse-length-scaled thresholds of polarizer coatings. An exponent of 0.18 was used in Eq. (1) to scale the thresholds taken at 10 to 3 ns. The slope is 1.00 ± 0.13; the correlation is 66%.

Fig. 4
Fig. 4

Error box diagram. Errors arising from the qualified (diamond), probable (square), and failed (triangle) thresholds. If the error box crosses the ideal-fit line, then the data point is considered acceptable.

Fig. 5
Fig. 5

Comparison of damage thresholds using the ISO 10110-13 and NIF MEL01-013 test procedures on the same coating witnesses.

Tables (2)

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Table 1 Laser Damage Threshold Correlation to Data from the LLNL Pretested Samples

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Table 2 Comparison of Qualified Laser Damage Thresholdsa

Equations (1)

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LDT ( 3 ) = LDT ( t ) × ( 3 / t ) x ,

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