Abstract

The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt.43, 2443 ( 2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 µm.

© 2005 Optical Society of America

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    [CrossRef]
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    [CrossRef] [PubMed]
  3. W. Augustyn, “An analysis polarization mixing errors in distance measuring interferometer,” J. Vac. Sci. Technol. B 8, 2032–2036 (1990).
    [CrossRef]
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    [CrossRef]
  5. I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
  13. Spectra-Physics Inc., Spectra-Physics Model 117A Stabilized Helium-Neon Laser Instruction Manual (Spectra-Physics, 1997), http://www.newport.com/store/product.aspx?lone=&ltwo=&id=5220&lang=1&section=Specs .

2004

2003

I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
[CrossRef]

2002

2001

T. B. Eom, J. Y. Kim, K. Jeong, “The dynamic compensation of nonlinearity in a homodyne laser interferometer,” Meas. Sci. Technol. 12, 1734–1738 (2001).
[CrossRef]

1999

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

1996

C. Wu, C. Su, “Nonlinearity in measurement of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996).
[CrossRef]

J. Stone, S. D. Phillips, “Corrections for wavelength variations in precision interferometric displacement measurements,” J. Res. Natl. Inst. Stand. Technol. 101, 671–674 (1996).
[CrossRef]

C. Wu, C. Su, G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520–524 (1996).
[CrossRef]

1995

V. Greco, G. Molesini, F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729–3734 (1995).
[CrossRef]

1990

K. P. Birch, “Optical fringe subdivision with nanometric accuracy,” Precis. Eng. 12, 195–198 (1990).
[CrossRef]

W. Augustyn, “An analysis polarization mixing errors in distance measuring interferometer,” J. Vac. Sci. Technol. B 8, 2032–2036 (1990).
[CrossRef]

1981

Augustyn, W.

W. Augustyn, “An analysis polarization mixing errors in distance measuring interferometer,” J. Vac. Sci. Technol. B 8, 2032–2036 (1990).
[CrossRef]

Birch, K. P.

K. P. Birch, “Optical fringe subdivision with nanometric accuracy,” Precis. Eng. 12, 195–198 (1990).
[CrossRef]

Doi, T.

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Eom, T. B.

T. B. Eom, J. Y. Kim, K. Jeong, “The dynamic compensation of nonlinearity in a homodyne laser interferometer,” Meas. Sci. Technol. 12, 1734–1738 (2001).
[CrossRef]

Fujimoto, H.

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Gonda, S.

T. Keem, S. Gonda, I. Misumi, Q. Huang, T. Kurosawa, “Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems,” Appl. Opt. 43, 2443–2448 (2004).
[CrossRef] [PubMed]

I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
[CrossRef]

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Greco, V.

V. Greco, G. Molesini, F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729–3734 (1995).
[CrossRef]

Heydemann, P. L. M.

Hisata, N.

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Huang, Q.

Jeong, K.

T. B. Eom, J. Y. Kim, K. Jeong, “The dynamic compensation of nonlinearity in a homodyne laser interferometer,” Meas. Sci. Technol. 12, 1734–1738 (2001).
[CrossRef]

Keem, T.

Kim, J. Y.

T. B. Eom, J. Y. Kim, K. Jeong, “The dynamic compensation of nonlinearity in a homodyne laser interferometer,” Meas. Sci. Technol. 12, 1734–1738 (2001).
[CrossRef]

Kurosawa, T.

T. Keem, S. Gonda, I. Misumi, Q. Huang, T. Kurosawa, “Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems,” Appl. Opt. 43, 2443–2448 (2004).
[CrossRef] [PubMed]

I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
[CrossRef]

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Misumi, I.

T. Keem, S. Gonda, I. Misumi, Q. Huang, T. Kurosawa, “Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems,” Appl. Opt. 43, 2443–2448 (2004).
[CrossRef] [PubMed]

I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
[CrossRef]

Molesini, G.

V. Greco, G. Molesini, F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729–3734 (1995).
[CrossRef]

Oliver, P. L.

Peng, G. S.

C. Wu, C. Su, G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520–524 (1996).
[CrossRef]

Phillips, S. D.

J. Stone, S. D. Phillips, “Corrections for wavelength variations in precision interferometric displacement measurements,” J. Res. Natl. Inst. Stand. Technol. 101, 671–674 (1996).
[CrossRef]

Quercioli, F.

V. Greco, G. Molesini, F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729–3734 (1995).
[CrossRef]

Serge, D.

Stone, J.

J. Stone, S. D. Phillips, “Corrections for wavelength variations in precision interferometric displacement measurements,” J. Res. Natl. Inst. Stand. Technol. 101, 671–674 (1996).
[CrossRef]

Su, C.

C. Wu, C. Su, “Nonlinearity in measurement of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996).
[CrossRef]

C. Wu, C. Su, G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520–524 (1996).
[CrossRef]

Takamasu, K.

I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
[CrossRef]

Tanimura, Y.

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Wu, C.

C. Wu, C. Su, “Nonlinearity in measurement of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996).
[CrossRef]

C. Wu, C. Su, G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520–524 (1996).
[CrossRef]

Yamagishi, T.

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Yukawa, H.

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Appl. Opt.

J. Res. Natl. Inst. Stand. Technol.

J. Stone, S. D. Phillips, “Corrections for wavelength variations in precision interferometric displacement measurements,” J. Res. Natl. Inst. Stand. Technol. 101, 671–674 (1996).
[CrossRef]

J. Vac. Sci. Technol. B

W. Augustyn, “An analysis polarization mixing errors in distance measuring interferometer,” J. Vac. Sci. Technol. B 8, 2032–2036 (1990).
[CrossRef]

Meas. Sci. Technol.

I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu, “Uncertainty in pitch measurement of one-dimensional grating standards using a nanometrological atomic force microscope,” Meas. Sci. Technol. 14, 463–471 (2003).
[CrossRef]

C. Wu, C. Su, G. S. Peng, “Correction of nonlinearity in one-frequency optical interferometry,” Meas. Sci. Technol. 7, 520–524 (1996).
[CrossRef]

T. B. Eom, J. Y. Kim, K. Jeong, “The dynamic compensation of nonlinearity in a homodyne laser interferometer,” Meas. Sci. Technol. 12, 1734–1738 (2001).
[CrossRef]

C. Wu, C. Su, “Nonlinearity in measurement of length by optical interferometry,” Meas. Sci. Technol. 7, 62–68 (1996).
[CrossRef]

Opt. Lett.

Precis. Eng.

K. P. Birch, “Optical fringe subdivision with nanometric accuracy,” Precis. Eng. 12, 195–198 (1990).
[CrossRef]

Rev. Sci. Instrum.

V. Greco, G. Molesini, F. Quercioli, “Accurate polarization interferometer,” Rev. Sci. Instrum. 66, 3729–3734 (1995).
[CrossRef]

S. Gonda, T. Doi, T. Kurosawa, Y. Tanimura, N. Hisata, T. Yamagishi, H. Fujimoto, H. Yukawa, “Real-time, interferometrically measuring atomic force microscope for direct calibration of standards,” Rev. Sci. Instrum. 70, 3362–3368 (1999).
[CrossRef]

Other

Spectra-Physics Inc., Spectra-Physics Model 117A Stabilized Helium-Neon Laser Instruction Manual (Spectra-Physics, 1997), http://www.newport.com/store/product.aspx?lone=&ltwo=&id=5220&lang=1&section=Specs .

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