Abstract

The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 ( 2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 µm.

© 2005 Optical Society of America

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