Abstract

The development of multilayer mirrors for continual use around the K-absorption edge of carbon (4.4 nm) has been begun. Cobalt oxide (Co3O4), silicon oxide (SiO2), and boron nitride (BN) are found to be suitable for multilayer mirrors on the basis of theoretical calculations for wavelengths around the carbon K-absorption edge region. X-ray reflectivity curves with CuKα 1 x rays of the fabricated Co3O4/SiO2 multilayers have sharp Bragg peaks, and the layer structures evaluated from transmission electron microscopy (TEM) observations are uniform. On the other hand, the Bragg peaks of Co3O4/BN multilayers split, and aggregated Co3O4 is observed. To improve the Co3O4 layer structure, chromium oxide (Cr2O3) was mixed into Co3O4. The mixed oxide layer structure in the Mix/BN multilayer (Mix = Co3O4 + Cr2O3) is relatively uniform, and the Bragg peaks do not split.

© 2004 Optical Society of America

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2002 (2)

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

2000 (2)

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

F. Schäfers, “Multilayers for the EUV/soft x-ray range,” Physica B 283, 119–124 (2000).
[CrossRef]

1999 (1)

1998 (1)

1997 (1)

1995 (1)

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

1992 (2)

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

M. Yamamoto, T. Namioka, “Layer-by-layer design method for soft-x-ray multilayers,” Appl. Opt. 31, 1622–1630 (1992).
[CrossRef] [PubMed]

1990 (1)

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

1985 (2)

J. Kirz, H. Rarback, “Soft x-ray microscopy,” Rev. Sci. Instrum. 56, 1–13 (1985).
[CrossRef]

M. Howells, J. Kirz, D. Sayre, G. Schmahl, “Soft x-ray microscopes,” Phys. Today 38(8), 22–32 (1985).
[CrossRef]

Anderson, E.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Attwood, D. T.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Balhorn, R.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Barbee, T. W.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Böni, P.

Brase, J.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Butzbach, R.

Clemens, D.

Corzett, M.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Da Silva, L. B.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Daido, H.

Di Fonzo, S.

Diel, I.

Fields, D. J.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Förster, E.

Friedrich, J.

Gray, J.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Grimmer, H.

Gu, Y.

Gullikson, E.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Guttmann, P.

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

Hirano, T.

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

Horisberger, M.

Howells, M.

M. Howells, J. Kirz, D. Sayre, G. Schmahl, “Soft x-ray microscopes,” Phys. Today 38(8), 22–32 (1985).
[CrossRef]

Huang, G.

Ichimaru, S.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Ito, H.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Jark, W.

Kato, Y.

Keane, C. J.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Kern, D.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Kimoto, K.

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

Kirz, J.

M. Howells, J. Kirz, D. Sayre, G. Schmahl, “Soft x-ray microscopes,” Phys. Today 38(8), 22–32 (1985).
[CrossRef]

J. Kirz, H. Rarback, “Soft x-ray microscopy,” Rev. Sci. Instrum. 56, 1–13 (1985).
[CrossRef]

Knöchel, C.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

Koch, J. A.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Kunz, C.

Larabell, C.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

Lee, C.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Legros, M.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

London, R. A.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

MacGowan, B. J.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Matthews, D. L.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Maxon, S.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Mertins, H.-Ch.

Mima, K.

Mrowka, S.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Müeller, B. R.

Murai, K.

Muramatsu, Y.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Nagai, K.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Namikawa, K.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

Namioka, T.

Narishige, S.

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

Niemann, B.

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

Norimatsu, T.

Osterheld, A. L.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Perera, R. C. C.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Rarback, H.

J. Kirz, H. Rarback, “Soft x-ray microscopy,” Rev. Sci. Instrum. 56, 1–13 (1985).
[CrossRef]

Rudolph, D.

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

Sakaya, N.

Sakuma, T.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

Sayre, D.

M. Howells, J. Kirz, D. Sayre, G. Schmahl, “Soft x-ray microscopes,” Phys. Today 38(8), 22–32 (1985).
[CrossRef]

Schäfers, F.

Schmahl, G.

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

M. Howells, J. Kirz, D. Sayre, G. Schmahl, “Soft x-ray microscopes,” Phys. Today 38(8), 22–32 (1985).
[CrossRef]

Schneider, G.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

Scofield, J. H.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Sebban, S.

Shimkaveg, G.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Stone, G.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Stone, G. F.

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Takenaka, H.

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

Tang, H.

Tohyama, Y.

Trebes, J. E.

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Usami, K.

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

Uschmann, I.

Vogt, S.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

Vollbrecht, M.

Wang, S.

Weiss, D.

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

Yahisa, Y.

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

Yamamoto, M.

Appl. Opt. (3)

J. Opt. Soc. Am. B (1)

Jpn. J. Appl. Phys. (1)

K. Kimoto, Y. Yahisa, T. Hirano, K. Usami, S. Narishige, “Observation of compositional separation in CoCrTa thin film using transmission electron microscope with imaging filter,” Jpn. J. Appl. Phys. 34, L352–L354 (1995).
[CrossRef]

Phys. Rev. Lett. (1)

B. J. MacGowan, S. Maxon, L. B. Da Silva, D. J. Fields, C. J. Keane, D. L. Matthews, A. L. Osterheld, J. H. Scofield, G. Shimkaveg, G. F. Stone, “Demonstration of x-ray amplifiers near the carbon K edge,” Phys. Rev. Lett. 65, 420–423 (1990).
[CrossRef] [PubMed]

Phys. Today (1)

M. Howells, J. Kirz, D. Sayre, G. Schmahl, “Soft x-ray microscopes,” Phys. Today 38(8), 22–32 (1985).
[CrossRef]

Physica B (1)

F. Schäfers, “Multilayers for the EUV/soft x-ray range,” Physica B 283, 119–124 (2000).
[CrossRef]

Rev. Sci. Instrum. (1)

J. Kirz, H. Rarback, “Soft x-ray microscopy,” Rev. Sci. Instrum. 56, 1–13 (1985).
[CrossRef]

Science (1)

L. B. Da Silva, J. E. Trebes, R. Balhorn, S. Mrowka, E. Anderson, D. T. Attwood, T. W. Barbee, J. Brase, M. Corzett, J. Gray, J. A. Koch, C. Lee, D. Kern, R. A. London, B. J. MacGowan, D. L. Matthews, G. Stone, “X-ray laser microscopy of rat sperm nuclei,” Science 258, 269–271 (1992).
[CrossRef] [PubMed]

Surf. Rev. Lett. (2)

G. Schneider, E. Anderson, S. Vogt, C. Knöchel, D. Weiss, M. Legros, C. Larabell, “Computed tomography of cryogenic cells,” Surf. Rev. Lett. 9, 177–183 (2002).
[CrossRef]

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Soft x-ray reflectivity and thermal stability of CoCr/C multilayer X-ray mirrors,” Surf. Rev. Lett. 9, 593–596 (2002).
[CrossRef]

Ultramicroscopy (1)

D. Weiss, G. Schneider, B. Niemann, P. Guttmann, D. Rudolph, G. Schmahl, “Computed tomography of cryogenic biological specimens based on x-ray microscopic images,” Ultramicroscopy 84, 185–197 (2000).
[CrossRef] [PubMed]

Other (1)

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, Y. Muramatsu, E. Gullikson, R. C. C. Perera, “Reflectivities evaluation of multilayer mirrors for wavelengths of around 6 nm,” Extended Abstracts of the 62nd Autumn Meeting, September 11–14, 2001 (Japan Society of Applied Physics, Tokyo, 2001), paper 11p-D-6.

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