Abstract

The development of multilayer mirrors for continual use around the K-absorption edge of carbon (4.4 nm) has been begun. Cobalt oxide (Co3O4), silicon oxide (SiO2), and boron nitride (BN) are found to be suitable for multilayer mirrors on the basis of theoretical calculations for wavelengths around the carbon K-absorption edge region. X-ray reflectivity curves with CuKα 1 x rays of the fabricated Co3O4/SiO2 multilayers have sharp Bragg peaks, and the layer structures evaluated from transmission electron microscopy (TEM) observations are uniform. On the other hand, the Bragg peaks of Co3O4/BN multilayers split, and aggregated Co3O4 is observed. To improve the Co3O4 layer structure, chromium oxide (Cr2O3) was mixed into Co3O4. The mixed oxide layer structure in the Mix/BN multilayer (Mix = Co3O4 + Cr2O3) is relatively uniform, and the Bragg peaks do not split.

© 2004 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription