Abstract

We report an experimental study of enhanced optical birefringence in silicon thin films on glass substrates. Form anisotropy is introduced as an atomic-scale morphological structure through dynamic control of growth geometry. The resulting birefringence is large compared with naturally anisotropic crystals and is comparable to two-dimensional photonic crystals. The films are fabricated with serial bideposition onto a substrate held at a fixed tilt angle relative to the impinging vapor. Films were analyzed by spectroscopic ellipsometry and scanning electron microscopy, the latter clearly revealing form anisotropy in a morphology of bunched columns perpendicular to the deposition plane with dimensions of hundreds of nanometers and smaller. The observed linear birefringence varies with wavelength and tilt angle, with a maximum of 0.4 at a 630-nm wavelength and 0.25 at 1500 nm.

© 2004 Optical Society of America

Full Article  |  PDF Article
Related Articles
Thin film retardation plate by oblique deposition

Tomoyoshi Motohiro and Y. Taga
Appl. Opt. 28(13) 2466-2482 (1989)

In situ monitoring of film deposition with an ellipsometer based on a four-detector photopolarimeter

E. Masetti, M. Montecchi, R. Larciprete, and S. Cozzi
Appl. Opt. 35(28) 5626-5629 (1996)

Vacuum deposition of chiral sculptured thin films with high optical activity

Ian Hodgkinson, Qi hong Wu, Ben Knight, Akhlesh Lakhtakia, and Kevin Robbie
Appl. Opt. 39(4) 642-649 (2000)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (11)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription